Selective etching of ZnTe in HF:H2O2:H2O solution: Interpretation of extended defect-related etch figures

Rui Yang, Wanqi Jie

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

HF:H2O2:H2O solution (40%wt.HF: 30wt.%H2O2: H2O, 3:2:1 by volume) was used to reveal extended defects (line, face and volume defects) in bulk ZnTe crystals grown from Te solution. The etch patterns were analyzed based on their size, shape and distribution. The etch figures, both in the shape of pits and hillocks with high resolution, show forms controlled by the symmetries of the respective faces were produced. Two different sizes of pits were observed, the larger-size pits correspond to dislocations penetrating the surface, however, the smaller-size texture pits are produced on the defect-free region, which serve as standard pits on respect faces. The face defects, such as grain boundaries, sub-grain boundaries, dislocation walls, twins and stacking faults, can be all displayed clearly. Another essential feature of the etchant is that, it can effectively dissolve Te-rich phase (Te inclusion/precipitates), which makes it promising to reveal the shape of this volume defect. 40%wt.HF:30wt.%H2O2:H2O (3:2:1 by volume) solution shows strong orientation and phase selectivity, it is also very sensitive to impurity decorated defects, thus can effectively reveal various extended defects (line, face and volume defects) of ZnTe crystals. In addition, smaller size texture pits are also produced on the defect-free regions, which serve as reference standard pits during the analysis of defect-related etch figures.

Original languageEnglish
Pages (from-to)215-222
Number of pages8
JournalCrystal Research and Technology
Volume50
Issue number3
DOIs
StatePublished - 1 Mar 2015

Keywords

  • defect-selective etching
  • extended defects
  • HF:HO:HO solution
  • texturization
  • ZnTe

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