@inproceedings{e8adf1f8f4604b9c9b3be9d6a5abc659,
title = "Sandwich Structured Flexible Thermal Shear Stress Sensor with Improved Performance",
abstract = "We present a micro flexible thermal shear stress sensor with sandwich structure for enhanced static sensitivity and dynamic response performance. This sandwich structure consists of a guard-heater just underneath the thermistor and electrically isolated by a Parylene C film. The working temperature of the guard-heater is identical with the thermistor to eliminate unwanted heat conduction from the thermistor to the substrate. Compared with thermistor working individually, the results of shear stress calibration test and step current characterization demonstrate a 47% increase in sensitivity and 50% reduction in time constant when the thermistor and guard-heater working simultaneously.",
keywords = "Flexible thermal sensor, sandwich structure, sensitivity, shear stress, time constant",
author = "Baoyun Sun and Wei Gao and Pengbin Wang and Runbo Chen and Jian Luo and Jinjun Deng and Weizheng Yuan and Binghe Ma",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",
year = "2020",
month = jan,
doi = "10.1109/MEMS46641.2020.9056242",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "653--656",
booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",
}