Abstract
Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.
Original language | English |
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Pages (from-to) | 493-494 |
Number of pages | 2 |
Journal | Chinese Chemical Letters |
Volume | 7 |
Issue number | 5 |
State | Published - 1996 |
Externally published | Yes |