Properties of ultrafine SnOx thin film made by plasma polymerization

Yong Zhang, Kun Lin Zhou, Wei Min Cao, Wei Min Liu

Research output: Contribution to journalArticlepeer-review

Abstract

Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow discharge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated. The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200°C.

Original languageEnglish
Pages (from-to)493-494
Number of pages2
JournalChinese Chemical Letters
Volume7
Issue number5
StatePublished - 1996
Externally publishedYes

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