Programmable patterned MoS2 film by direct laser writing for health-related signals monitoring

Manzhang Xu, Jiuwei Gao, Juncai Song, Hanxin Wang, Lu Zheng, Yuan Wei, Yongmin He, Xuewen Wang, Wei Huang

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

The two-dimensional (2D) transition metal dichalcogenides (TMDs) are promising flexible electronic materials for strategic flexible information devices. Large-area and high-quality patterned materials were usually required by flexible electronics due to the limitation from the process of manufacturing and integration. However, the synthesis of large-area patterned 2D TMDs with high quality is difficult. Here, an efficient and powerful pulsed laser has been developed to synthesize wafer-scale MoS2. The flexible strain sensor was fabricated using MoS2 and showed high performance of low detection limit (0.09%), high gauge factor (1,118), and high stability (1,000 cycles). Besides, we demonstrated its applications in real-time monitoring of health-related physiological signals such as radial artery pressure, respiratory rate, and vocal cord vibration. Our findings suggest that the laser-assisted method is effective and capable of synthesizing wafer-scale 2D TMDs, which opens new opportunities for the next flexible electronic devices and wearable health monitoring.

Original languageEnglish
Article number103313
JournaliScience
Volume24
Issue number11
DOIs
StatePublished - 19 Nov 2021

Keywords

  • Nanomaterials
  • Physics
  • Sensor system

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