Preparation conditions of VO2 thin films by a sol-gel method

Dachuan Yin; Niankan Xu; Zhengtang Liu; Jingyu Zhang; Xiulin Zheng

Preparation conditions of VO₂ thin films by a sol-gel method

Dachuan Yin, Niankan Xu, Zhengtang Liu, Jingyu Zhang, Xiulin Zheng

School of life sciences

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Preparation conditions for producing VO₂ thin films by using an inorganic sol-gel method have been studied by orthogonal experimental design. It has been found that vacuum heat treatment conditions have the strong effects on the electric properties of VO₂ thin films. Treatment temperature is the best important parameter. In the parameter ranges of 340-500°C, 40-240min. and 0.25-0.45 μm the optimum process parameters of preparing the thin film, which obtain the largest electric resistance switching, are 500°C of treatment temperature, 140 min. of treatment time and 0.25 μm. of films thickness.

Original language	English
Pages (from-to)	52-55
Number of pages	4
Journal	Gongneng Cailiao/Journal of Functional Materials
Volume	28
Issue number	1
State	Published - 1 Jan 1997

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title = "Preparation conditions of VO2 thin films by a sol-gel method",

abstract = "Preparation conditions for producing VO2 thin films by using an inorganic sol-gel method have been studied by orthogonal experimental design. It has been found that vacuum heat treatment conditions have the strong effects on the electric properties of VO2 thin films. Treatment temperature is the best important parameter. In the parameter ranges of 340-500°C, 40-240min. and 0.25-0.45 μm the optimum process parameters of preparing the thin film, which obtain the largest electric resistance switching, are 500°C of treatment temperature, 140 min. of treatment time and 0.25 μm. of films thickness.",

author = "Dachuan Yin and Niankan Xu and Zhengtang Liu and Jingyu Zhang and Xiulin Zheng",

year = "1997",

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day = "1",

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T1 - Preparation conditions of VO2 thin films by a sol-gel method

AU - Yin, Dachuan

AU - Xu, Niankan

AU - Liu, Zhengtang

AU - Zhang, Jingyu

AU - Zheng, Xiulin

PY - 1997/1/1

Y1 - 1997/1/1

N2 - Preparation conditions for producing VO2 thin films by using an inorganic sol-gel method have been studied by orthogonal experimental design. It has been found that vacuum heat treatment conditions have the strong effects on the electric properties of VO2 thin films. Treatment temperature is the best important parameter. In the parameter ranges of 340-500°C, 40-240min. and 0.25-0.45 μm the optimum process parameters of preparing the thin film, which obtain the largest electric resistance switching, are 500°C of treatment temperature, 140 min. of treatment time and 0.25 μm. of films thickness.

AB - Preparation conditions for producing VO2 thin films by using an inorganic sol-gel method have been studied by orthogonal experimental design. It has been found that vacuum heat treatment conditions have the strong effects on the electric properties of VO2 thin films. Treatment temperature is the best important parameter. In the parameter ranges of 340-500°C, 40-240min. and 0.25-0.45 μm the optimum process parameters of preparing the thin film, which obtain the largest electric resistance switching, are 500°C of treatment temperature, 140 min. of treatment time and 0.25 μm. of films thickness.

UR - http://www.scopus.com/inward/record.url?scp=0031070154&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:0031070154

SN - 1001-9731

VL - 28

SP - 52

EP - 55

JO - Gongneng Cailiao/Journal of Functional Materials

JF - Gongneng Cailiao/Journal of Functional Materials

IS - 1

ER -

Preparation conditions of VO₂ thin films by a sol-gel method

Abstract

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