Precise processing of transparent material with femtosecond laser pulses

Lin Ma, Shunxiang Shi, Guanghua Cheng, Wei Zhao, Guofu Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Based on the physical mechanisms of femtosecond laser-transparent materials interactions, three kinds of micromachining including three dimensional data storage, optical waveguide network and grating with an amplified Ti:sapphire laser system are presented. These optical devices on different transparent materials by femtosecond pulses are featured. The effect of laser machined parameters such as irradiated energy, the scanning speed and the recording material upon fabricated optical devices is studied in detail. From examples, the versatility of femtosecond laser precise micromachining technique is demonstrated. Practical application of femtosecond laser materials processing is illuminated.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
StatePublished - 2006
Externally publishedYes
Event2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies - Xian, China
Duration: 2 Nov 20055 Nov 2005

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6149
ISSN (Print)0277-786X

Conference

Conference2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Advanced Optical Manufacturing and Testing Technologies
Country/TerritoryChina
CityXian
Period2/11/055/11/05

Keywords

  • Femtosecond laser pulse
  • Laser precise processing
  • Micromachining
  • Transparent material

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