@inproceedings{27eef5e5d9d54311985074e774287158,
title = "Phase-Controlled Oscillation in a Capacitive Nonlinear Ring Resonator with On-Chip Feedthrough De-Embedding",
abstract = "Mechanical oscillators employing varying capacitance scheme for the transduction of the motion are significantly limited by the effects of capacitive feedthrough. This work focuses on revealing the nature of feedthrough parasitic dominated resonance and demonstrating a phase-controlled oscillation technique for operating microresonators beyond the nonlinear regime with on-chip feedthrough effect (FE) de-embedding. Our method imposes hybrid control on the phase offset of the resonant motion and electromechanical coupling of the transducers to enable the isolation of the FE in the nonlinear bifurcation points. The strategies of the on-chip FE control in our capacitive platform can be suitably transformed for the use in feedthrough parasitic dominated systems using alternative transduction principles as well.",
keywords = "Bifurcation, Feedthrough effect, MEMS, Nonlinear dynamics, Oscillators, Resonators",
author = "Dongyang Chen and Hemin Zhang and Jiangkun Sun and Milind Pandit and Guillermo Sobreviela and Yong Wang and Qian Zhang and Ashwin Seshia and Jin Xie",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",
year = "2020",
month = jan,
doi = "10.1109/MEMS46641.2020.9056278",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "773--776",
booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",
}