Patterning single-layer materials by electrical breakdown using atomic force microscopy

Yajie Yang; Jiajia Lu; Yanbo Xie; Libing Duan

doi:10.1063/10.0023848

Patterning single-layer materials by electrical breakdown using atomic force microscopy

Yajie Yang, Jiajia Lu, Yanbo Xie, Libing Duan

School of Aeronautics

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

Abstract

ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.

Original language	English
Article number	013008
Journal	Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume	7
Issue number	1
DOIs	https://doi.org/10.1063/10.0023848
State	Published - 1 Mar 2024

Keywords

2D material
AFM
Electrical breakdown
Lithography
Nanopattern

Access to Document

10.1063/10.0023848

Cite this

@article{6369211e84214c2c9a7ccc7221035b42,

title = "Patterning single-layer materials by electrical breakdown using atomic force microscopy",

abstract = "ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.",

keywords = "2D material, AFM, Electrical breakdown, Lithography, Nanopattern",

author = "Yajie Yang and Jiajia Lu and Yanbo Xie and Libing Duan",

note = "Publisher Copyright: {\textcopyright} 2024 2023 Author(s).",

year = "2024",

month = mar,

day = "1",

doi = "10.1063/10.0023848",

language = "英语",

volume = "7",

journal = "Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering",

issn = "1672-6030",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Patterning single-layer materials by electrical breakdown using atomic force microscopy

AU - Yang, Yajie

AU - Lu, Jiajia

AU - Xie, Yanbo

AU - Duan, Libing

PY - 2024/3/1

Y1 - 2024/3/1

N2 - ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.

AB - ARTICLE HIGHLIGHTS HIGHLIGHTS • Successful patterning of 2D materials by electrical breakdown. • A maskless, pollution-free method for patterning various 2D materials. • Nanopattern size is characterized by number of voltage scanning cycles.

KW - 2D material

KW - AFM

KW - Electrical breakdown

KW - Lithography

KW - Nanopattern

UR - http://www.scopus.com/inward/record.url?scp=85181160661&partnerID=8YFLogxK

U2 - 10.1063/10.0023848

DO - 10.1063/10.0023848

M3 - 文章

AN - SCOPUS:85181160661

SN - 1672-6030

VL - 7

JO - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

JF - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

IS - 1

M1 - 013008

ER -

Patterning single-layer materials by electrical breakdown using atomic force microscopy

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this