Parametrically tunable coupling factor for the weakly coupled resonators

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1 Scopus citations

Abstract

In this paper, we presented the electrostatic tuning functions of the coupling factor for the weakly coupled resonators (WCRs) for the first time. A WCRs system with two mechanical coupled double-ended-tuning-fork (DETF) resonators is designed, fabricated and tested to verify the tuning theory. In consistency with the theoretical expectations, the experimental results show that the coupling factor is in a quadratic function with the bias voltage, and the coupling factor exponentially decays with the relevant geometry parameters. A large tunable range of the coupling factor with the minimum value of ∼0.000917 and the maximum value of ∼0.00196 is obtained by tuning the bias voltage applied on the WCRs. It lays the foundation for controlling the sensitivity and resolution of the WCRs based sensors.

Original languageEnglish
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages70-73
Number of pages4
ISBN (Electronic)9781509019472
DOIs
StatePublished - 28 Nov 2016
Event11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan
Duration: 17 Apr 201620 Apr 2016

Publication series

Name2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Conference

Conference11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Country/TerritoryJapan
CitySendai
Period17/04/1620/04/16

Keywords

  • coupling factor
  • electrostatic negative stiffness
  • quadratic tuning
  • weakly coupled resonators

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