TY - GEN
T1 - One-Step Laser-Induced Dissolvable PVA Mask for 3D Soft Carbon Electrode Array
AU - Wang, Xuanqi
AU - Xue, Kai
AU - Bai, Ruiyu
AU - Huang, Ye
AU - Zhang, Zimo
AU - You, Xiaoli
AU - Wang, Minghao
AU - Chang, Honglong
AU - Ji, Bowen
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - This paper introduces a 3D soft carbon electrode array, fabricated through a one-step laser-induced process integrating a water-dissolvable polyvinyl alcohol (PVA) mask. This approach achieves precise conical microstructures and robust conductive channels using hybrid MWCNT@PDMS conductive paste. The soft carbon electrode sites with a 3D conical microstructure are designed to enhance proximity to neural tissue, thereby enhancing electrocorticogram (ECoG) signal quality and enabling effective neural stimulation. The electrode array demonstrates remarkable stretchability (25% over 1,000 cycles without failure) and stability (equivalent to 66 days in vivo). Compared to conventional materials, our electrodes exhibit superior electrochemical properties, including lower impedance (9.7 kΩ at 1 kHz) and higher signal-to-noise ratio (SNR, 61.7 dB). Thus, this one-step process is a cost-effective, scalable solution for recording and modulating central or peripheral neural tissues.
AB - This paper introduces a 3D soft carbon electrode array, fabricated through a one-step laser-induced process integrating a water-dissolvable polyvinyl alcohol (PVA) mask. This approach achieves precise conical microstructures and robust conductive channels using hybrid MWCNT@PDMS conductive paste. The soft carbon electrode sites with a 3D conical microstructure are designed to enhance proximity to neural tissue, thereby enhancing electrocorticogram (ECoG) signal quality and enabling effective neural stimulation. The electrode array demonstrates remarkable stretchability (25% over 1,000 cycles without failure) and stability (equivalent to 66 days in vivo). Compared to conventional materials, our electrodes exhibit superior electrochemical properties, including lower impedance (9.7 kΩ at 1 kHz) and higher signal-to-noise ratio (SNR, 61.7 dB). Thus, this one-step process is a cost-effective, scalable solution for recording and modulating central or peripheral neural tissues.
KW - 3D soft carbon electrode
KW - Controlled depth laser cutting
KW - Dissolvable PVA mask
KW - Electrocorticogram
UR - http://www.scopus.com/inward/record.url?scp=105001660619&partnerID=8YFLogxK
U2 - 10.1109/MEMS61431.2025.10917919
DO - 10.1109/MEMS61431.2025.10917919
M3 - 会议稿件
AN - SCOPUS:105001660619
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 271
EP - 274
BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Y2 - 19 January 2025 through 23 January 2025
ER -