On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Hemin Zhang; Milind Pandit; Guillermo Sobreviela; Madan Parajuli; Dongyang Chen; Jiangkun Sun; Chun Zhao; Ashwin Seshia

doi:10.1109/MEMS51782.2021.9375204

On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

Hemin Zhang, Milind Pandit, Guillermo Sobreviela, Madan Parajuli, Dongyang Chen, Jiangkun Sun, Chun Zhao, Ashwin Seshia

University of Cambridge

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Scopus citations

Abstract

Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.

Original language	English
Title of host publication	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	830-833
Number of pages	4
ISBN (Electronic)	9781665419123
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375204
State	Published - 25 Jan 2021
Externally published	Yes
Event	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States Duration: 25 Jan 2021 → 29 Jan 2021

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2021-January
ISSN (Print)	1084-6999

Conference

Conference	34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/Territory	United States
City	Virtual, Gainesville
Period	25/01/21 → 29/01/21

Keywords

Accelerometer
Nonlinear effects
Vibration Mode Localization
Weakly Coupled Resonators

Access to Document

10.1109/MEMS51782.2021.9375204

Cite this

Zhang, H., Pandit, M., Sobreviela, G., Parajuli, M., Chen, D., Sun, J., Zhao, C., & Seshia, A. (2021). On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 (pp. 830-833). Article 9375204 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51782.2021.9375204

Zhang, Hemin ; Pandit, Milind ; Sobreviela, Guillermo et al. / On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime. 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 830-833 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime",

abstract = "Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.",

keywords = "Accelerometer, Nonlinear effects, Vibration Mode Localization, Weakly Coupled Resonators",

author = "Hemin Zhang and Milind Pandit and Guillermo Sobreviela and Madan Parajuli and Dongyang Chen and Jiangkun Sun and Chun Zhao and Ashwin Seshia",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",

year = "2021",

month = jan,

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doi = "10.1109/MEMS51782.2021.9375204",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Zhang, H, Pandit, M, Sobreviela, G, Parajuli, M, Chen, D, Sun, J, Zhao, C & Seshia, A 2021, On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime. in 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021., 9375204, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2021-January, Institute of Electrical and Electronics Engineers Inc., pp. 830-833, 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021, Virtual, Gainesville, United States, 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375204

On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime. / Zhang, Hemin; Pandit, Milind; Sobreviela, Guillermo et al.
34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 830-833 9375204 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2021-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Zhang, Hemin

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AU - Chen, Dongyang

AU - Sun, Jiangkun

AU - Zhao, Chun

AU - Seshia, Ashwin

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N2 - Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.

AB - Mode-localized sensors have attracted great attention due to the high parametric sensitivity and common mode rejection to temperature drift. The reported results from such sensors has largely relied on operation in the linear regime. However, operation at specific bifurcation points in the nonlinear regime can enable improvements in relevant performance metrics. This paper theoretically and experimentally reveals the operation of mode-localized sensors with respect to applied stiffness perturbations while operating in the nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with benefit of the insights gained from theoretical analysis with operation at the top bifurcation point in the nonlinear regime. A prototype accelerometer device demonstrates a noise floor of 85 ng/√Hz and a bias instability of 130 ng, establishing a new benchmark for sensors employing vibration mode localization as a sensing paradigm.

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Zhang H, Pandit M, Sobreviela G, Parajuli M, Chen D, Sun J et al. On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime. In 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 830-833. 9375204. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51782.2021.9375204

On the Sensitivity of Mode-Localized Accelerometers Operating in the Nonlinear Duffing Regime

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Keywords

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