Abstract
The micro-factory, as a new type of green manufacturing system, consists of compact facilities with small dimensions and high mobility. Micro-factory possesses original advantages such as less consummation of energy and raw material, high flexibility, less pollution and clean manufacturing environment. They are especially suitable for the fabrication of MEMS. The concept of desktop micro-factory for producing typical MEMS product - integrated mechanism is proposed. Based on the modeling method of virtual manufacturing, the desktop micro-factory of fabricating integrated mechanism with excimer laser direct writing is emphatically studied. According to the analysis of flows within the micro-factory, and its hierarchy structure, the framework and configuration of this desktop micro-factory are defined. This micro-factory composes of various modules, including laser-fabricating cell, image inspection system, software flat and computer control system, and sensors. The function, realization, and the integration relationship of these modules are also discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 495-499 |
| Number of pages | 5 |
| Journal | Jixie Qiangdu/Journal of Mechanical Strength |
| Volume | 23 |
| Issue number | 4 |
| State | Published - Dec 2001 |
Keywords
- Micro-electro-mechanical system
- Micro-factory
- System modeling