Numerical Simulation of Micro-Flow Surface Smoothing of Fused Silica by CO2 Laser

Xinyu Luo, Wei Yang, Ting Tan, Dexing Zhu, Jin Zhuo, Mincai Liu, Qinghua Zhang, Yaguo Li

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

Micro-flow smoothing of fused silica surface with CO2 lasers were numerically simulated. Two types of laser intensity distribution, namely Gaussian and top-hat, were modeled on various surface morphology. In the models, the surface tension and Marangoni effect were taken into account. The results show that surface tension and Marangoni effect acts synergically whereas surface tension dominates the resultant surface in our simulated conditions. Top-hat intensity is conducive to smoothing of fused silica glass. In addition, surfaces with both periodic and random topography can be smoothed. Under the 585.69 W/cm2 power density, the best roughness (RMS) of Gaussian and top-hat is 2.85 nm and 2.48 nm respectively (initial roughness > 700 nm).

Original languageEnglish
Pages (from-to)121-129
Number of pages9
JournalJournal of Laser Micro Nanoengineering
Volume16
Issue number2
DOIs
StatePublished - 2021
Externally publishedYes

Keywords

  • fused silica
  • laser smoothing
  • roughness
  • simulation
  • surface morphology

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