Abstract
A new precursor Ir(thd)3 was synthesized from iridium salts solution and Hthd. The structure of Ir(thd)3 was characterized by element analysis, infrared spectroscopy, and HNMR spectroscopy. The results of TG showed that the precursor was completely volatile near 290 °C. The Iridium films were prepared from the synthesized precursor by MOCVD. The structure and morphology of iridium films were studied by XRD and AFM. The results showed that the iridium films were successfully prepared and the surface of films was continuous and compact.
| Original language | English |
|---|---|
| Pages (from-to) | 1129-1131 |
| Number of pages | 3 |
| Journal | Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering |
| Volume | 35 |
| Issue number | 7 |
| State | Published - Jul 2006 |
Keywords
- Iridium film
- MOCVD
- Precursor