Multi-Chip 3D Integrated Micro-System Based on Microwave Multilayer

Cheng Yang, Zhenghu Zhu, Mengjie Hu, Chao Zhao, Xu Long

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

3D integrated vertical interconnection technology is an effective way to realize miniaturization, lightweight and high integration of electronic RF system. This paper introduces and verifies a hybrid interconnection structure that combines multiple types of chip stacking and flip chip welding in detail. The vertical interconnection of multiple types of chips and substrates is realized through two assembly methods of lead bonding and flip chip bonding. Finally, multiple active chips and passive devices are high-density integrated in a 60 mm × 60 mm × 1.5 mm active link volume. Compared with the traditional 2D packaging structure, the hybrid interconnection structure can reduce the packaging volume by more than 40% and increase the interconnection density by more than 2 times, effectively meeting the target requirements of miniaturization, functional diversification and rapid response of electronic system equipment.

Original languageEnglish
Title of host publicationComputational and Experimental Simulations in Engineering - Proceedings of ICCES 2023—Volume 3
EditorsShaofan Li
PublisherSpringer Science and Business Media B.V.
Pages1251-1258
Number of pages8
ISBN (Print)9783031449468
DOIs
StatePublished - 2024
Event29th International Conference on Computational and Experimental Engineering and Sciences, ICCES 2023 - Shenzhen, China
Duration: 26 May 202329 May 2023

Publication series

NameMechanisms and Machine Science
Volume146
ISSN (Print)2211-0984
ISSN (Electronic)2211-0992

Conference

Conference29th International Conference on Computational and Experimental Engineering and Sciences, ICCES 2023
Country/TerritoryChina
CityShenzhen
Period26/05/2329/05/23

Keywords

  • 3D integrated
  • Micro system
  • Multi-chip stacking

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