TY - JOUR
T1 - Micro-patterning of resin-bonded NdFeB magnet for a fully integrated electromagnetic actuator
AU - Tao, Kai
AU - Wu, Jin
AU - Kottapalli, Ajay Giri Prakash
AU - Chen, Di
AU - Yang, Zhuoqing
AU - Ding, Guifu
AU - Lye, Sun Woh
AU - Miao, Jianmin
N1 - Publisher Copyright:
© 2017 Elsevier Ltd
PY - 2017/12/1
Y1 - 2017/12/1
N2 - This paper reports a fully-integrated, batch-fabricated electromagnetic actuator which features micro-patterned NdFeB magnets. The entire actuator is fabricated through MEMS-compatible laminated surface micromachining technology, eliminating the requirement for further component assembly processes. The fabrication strategy allowed the entire volume of the actuator to be reduced to a small size of 2.5 × 2.5 × 2 mm3, which is one of the smallest NdFeB-based electromagnetic actuators demonstrated to date. The magnetic properties of NdFeB thin films are further investigated and optimized using different types of lithographically-defined micromolds. By altering the direction of the input current, actuating displacements of approximately ±10 µm are achieved during both the attraction and the repulsion operations. This work demonstrates the viability and compatibility of using polymer-bonded magnets for magnetic MEMS applications.
AB - This paper reports a fully-integrated, batch-fabricated electromagnetic actuator which features micro-patterned NdFeB magnets. The entire actuator is fabricated through MEMS-compatible laminated surface micromachining technology, eliminating the requirement for further component assembly processes. The fabrication strategy allowed the entire volume of the actuator to be reduced to a small size of 2.5 × 2.5 × 2 mm3, which is one of the smallest NdFeB-based electromagnetic actuators demonstrated to date. The magnetic properties of NdFeB thin films are further investigated and optimized using different types of lithographically-defined micromolds. By altering the direction of the input current, actuating displacements of approximately ±10 µm are achieved during both the attraction and the repulsion operations. This work demonstrates the viability and compatibility of using polymer-bonded magnets for magnetic MEMS applications.
UR - http://www.scopus.com/inward/record.url?scp=85029665132&partnerID=8YFLogxK
U2 - 10.1016/j.sse.2017.09.006
DO - 10.1016/j.sse.2017.09.006
M3 - 文章
AN - SCOPUS:85029665132
SN - 0038-1101
VL - 138
SP - 66
EP - 72
JO - Solid-State Electronics
JF - Solid-State Electronics
ER -