MEMS CAD methodology from 3D model to 2D mask layout

A transfer methodology from 3D model to 2D mask layout in MEMS CAD field was put forward after studied respectively the format of the standard 3D model file and the 2D mask layout file. The direct file-to-file's transfer procedure from 3D model to 2D mask layout was realized, and the corresponding interface has been developed in C++ programming language. Finally, the feasibility and the efficiency was validated by the structures of typical MEMS devices-micro accelerator and micro gyroscope, the result shows that the methodology is feasible and highly efficient, which provides a efficient approach for realizing MEMS top-down and discretional flow design, simplifying the process of drawing the mask layout.