MEMS CAD key technology in top-down design flow

MEMS CAD conversion tools which support the hierarchical top-down design flow are presented in this paper. They are the conversions from system netlist to 3D solid and mask layout, and from 3D solid to mask layout. Verilog-AMS HDL was adopted to describe the system behavior in which the whole system was composed of many sub-modules. The geometric parameters of each module was extracted from the relevant netlist and by applying adequate mathematical conversion algorithms to these parameters, the final 3D solid and mask layout were generated. The mask layout was regarded as the perpendicular projection of its 3D solid while adding layer information to the layout. Case study of a micro-resonator showed that these conversion tools are highly efficient.