Lightweight Inertial Switch with Spiral Separation Mechanism for Extending Contact Time

Mingyu Zhang, Tan Yin, Zhiyuan Hu, Mengcheng Wang, Haokai Huang, Yanxin Zhang, Yongcun Hao, Honglong Chang, Yan Wang, Yunna Sun, Zhuoqing Yang, Guifu Ding

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper reports a novel MEMS inertial switch that can extend contact time by spiral separation after collision between the lightweight asymmetric spring mass block and the fixed electrode. Four fixed electrodes with different contact areas are designed to verify the above mechanism. The simulation results show that the lightweight asymmetric spring mass block undergoes spiral separation after collision at a threshold of 148g. The inertial switches fabricated by surface micromachining technology are tested using a drop hammer system. Both the simulation and test results indicate that switches with larger fixed electrode areas exhibit longer contact time, confirming the mechanism of extending contact time through spiral separation after collision.

Original languageEnglish
Title of host publicationIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages733-736
Number of pages4
ISBN (Electronic)9798350357929
DOIs
StatePublished - 2024
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: 21 Jan 202425 Jan 2024

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/TerritoryUnited States
CityAustin
Period21/01/2425/01/24

Keywords

  • inertial switch
  • lightweight asymmetric spring mass block
  • MEMS
  • spiral separation

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