Large-aperture electromagnetically actuated MEMS Fabry-Perot filtering chips for visible spectral imaging

Benefitting from the inherent merits of tiny volume, customizable performance, good system compatibility and high-yield production, micro-electro-mechanical-system-based Fabry-Perot filtering chip (MEMS-FPFC) with a large aperture size gives a feasible way for the realization of miniaturized spectral imagers which can serve in many civilian and military scenarios. Although the aperture size of MEMS-FPFCs in mid-wave and long-wave infrared has reached to the centimeter scale, that of visible wavelength (VIS) MEMS-FPFC is always unsatisfied which is mainly limited by micromachining stress, especially in the thin films. In this work, we propose a large-aperture electromagnetically actuated MEMS-FPFC based on Si₃N₄ supporting membrane for VIS spectral imaging, which is designed with the assistance of multi-field coupling simulation model. A low-stress wafer-scale bulk micromachining process is developed to guarantee the high-quality and high-yield production for the aimed VIS MEMS-FPFCs. Finally, by the strictly controlling and rationally allocating the film stress of multi-layer film stack, VIS MEMS-FPFCs with 6 mm aperture size are thus developed, which can be tuned bidirectionally and continuously in 612-678 nm waveband with a good linear response of better than 95%. The achieved VIS MEMS-FPFCs can be utilized to construct miniaturized spectral imagers directly, aiming for such applications as intelligent agriculture, environmental protection and industrial inspection.