KDP crystal antireflective coatings prepared by spin coating method

Wei Yang; Haohao Hui; Hongju Ma; Wenlin Li; Xiangyang Lei; Qinghua Zhang

doi:10.3788/HPLPB20132512.3348

KDP crystal antireflective coatings prepared by spin coating method

Wei Yang, Haohao Hui, Hongju Ma, Wenlin Li, Xiangyang Lei, Qinghua Zhang

China Academy of Engineering Physics

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The KDP crystal antireflective coatings prepared by spin coating method were discussed. The coating was modified using hexamethyl disilazane (HMDS), and had good moisture-resistant property. Some technique problems such as clamping safety during the spin process were analysed. The coating uniformity, the transmittance, moisture-resistant property and the laser induced damage threshold (LIDT) were measured. The transmittance ununiformity of the coating was about 0.3%, the transmittance at 1053 nm was over 99.8%, the water contact angle was over 152°, and the LIDT was about 10 J/cm² (355 nm, 3 ns).

Original language	English
Pages (from-to)	3348-3352
Number of pages	5
Journal	Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams
Volume	25
Issue number	12
DOIs	https://doi.org/10.3788/HPLPB20132512.3348
State	Published - 2013
Externally published	Yes

Keywords

Antireflective coating
Coating uniformity
KDP crystal
Sol-gel
Spin coating

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10.3788/HPLPB20132512.3348

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title = "KDP crystal antireflective coatings prepared by spin coating method",

abstract = "The KDP crystal antireflective coatings prepared by spin coating method were discussed. The coating was modified using hexamethyl disilazane (HMDS), and had good moisture-resistant property. Some technique problems such as clamping safety during the spin process were analysed. The coating uniformity, the transmittance, moisture-resistant property and the laser induced damage threshold (LIDT) were measured. The transmittance ununiformity of the coating was about 0.3%, the transmittance at 1053 nm was over 99.8%, the water contact angle was over 152°, and the LIDT was about 10 J/cm2 (355 nm, 3 ns).",

keywords = "Antireflective coating, Coating uniformity, KDP crystal, Sol-gel, Spin coating",

author = "Wei Yang and Haohao Hui and Hongju Ma and Wenlin Li and Xiangyang Lei and Qinghua Zhang",

year = "2013",

doi = "10.3788/HPLPB20132512.3348",

language = "英语",

volume = "25",

pages = "3348--3352",

journal = "Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams",

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publisher = "Editorial Office of High Power Laser and Particle Beams",

number = "12",

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TY - JOUR

T1 - KDP crystal antireflective coatings prepared by spin coating method

AU - Yang, Wei

AU - Hui, Haohao

AU - Ma, Hongju

AU - Li, Wenlin

AU - Lei, Xiangyang

AU - Zhang, Qinghua

PY - 2013

Y1 - 2013

N2 - The KDP crystal antireflective coatings prepared by spin coating method were discussed. The coating was modified using hexamethyl disilazane (HMDS), and had good moisture-resistant property. Some technique problems such as clamping safety during the spin process were analysed. The coating uniformity, the transmittance, moisture-resistant property and the laser induced damage threshold (LIDT) were measured. The transmittance ununiformity of the coating was about 0.3%, the transmittance at 1053 nm was over 99.8%, the water contact angle was over 152°, and the LIDT was about 10 J/cm2 (355 nm, 3 ns).

AB - The KDP crystal antireflective coatings prepared by spin coating method were discussed. The coating was modified using hexamethyl disilazane (HMDS), and had good moisture-resistant property. Some technique problems such as clamping safety during the spin process were analysed. The coating uniformity, the transmittance, moisture-resistant property and the laser induced damage threshold (LIDT) were measured. The transmittance ununiformity of the coating was about 0.3%, the transmittance at 1053 nm was over 99.8%, the water contact angle was over 152°, and the LIDT was about 10 J/cm2 (355 nm, 3 ns).

KW - Antireflective coating

KW - Coating uniformity

KW - KDP crystal

KW - Sol-gel

KW - Spin coating

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DO - 10.3788/HPLPB20132512.3348

M3 - 文章

AN - SCOPUS:84890846654

SN - 1001-4322

VL - 25

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JO - Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams

JF - Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams

IS - 12

ER -

KDP crystal antireflective coatings prepared by spin coating method

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Keywords

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