Investigation on Microstructure Evolution and Visible-Infrared Property of Vacuum-Heat-Treated TiN Film

Linlin Lu, Jie Xu, Jie Dong, Xiaolei Su, Jia Liu

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

TiN films were prepared by direct current (DC) reactive magnetron sputtering technique and then vacuum-heat-treated at different temperatures (400, 600 and 800 °C) for 3600 s to improve their properties through increasing the crystallinity and eliminating the lattice defects of the films. Optical properties in the visible-infrared region of TiN films after vacuum heat treatment were investigated. Results revealed that optical reflectance of TiN films first increased and then decreased after the vacuum heat treatment. The reflectance of all the films was below 14%. With the heat treatment temperature rising from 400 to 600 °C, infrared emissivity of TiN films first dropped and then went up at 800 °C. As the heat treatment temperature was 600 °C, the infrared emissivity of TiN films could be reduced to 0.488 and was the lowest. Results showed that vacuum heat treatment could reduce the infrared emissivity of TiN films.

Original languageEnglish
Pages (from-to)7796-7801
Number of pages6
JournalJournal of Materials Engineering and Performance
Volume32
Issue number17
DOIs
StatePublished - Sep 2023
Externally publishedYes

Keywords

  • infrared emissivity
  • optical reflectance
  • TiN film
  • vacuum heat treatment

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