Investigation on Microstructure Evolution and Visible-Infrared Property of Vacuum-Heat-Treated TiN Film

Linlin Lu; Jie Xu; Jie Dong; Xiaolei Su; Jia Liu

doi:10.1007/s11665-022-07684-6

Investigation on Microstructure Evolution and Visible-Infrared Property of Vacuum-Heat-Treated TiN Film

Linlin Lu, Jie Xu, Jie Dong, Xiaolei Su, Jia Liu

Xi'an Polytechnic University

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

TiN films were prepared by direct current (DC) reactive magnetron sputtering technique and then vacuum-heat-treated at different temperatures (400, 600 and 800 °C) for 3600 s to improve their properties through increasing the crystallinity and eliminating the lattice defects of the films. Optical properties in the visible-infrared region of TiN films after vacuum heat treatment were investigated. Results revealed that optical reflectance of TiN films first increased and then decreased after the vacuum heat treatment. The reflectance of all the films was below 14%. With the heat treatment temperature rising from 400 to 600 °C, infrared emissivity of TiN films first dropped and then went up at 800 °C. As the heat treatment temperature was 600 °C, the infrared emissivity of TiN films could be reduced to 0.488 and was the lowest. Results showed that vacuum heat treatment could reduce the infrared emissivity of TiN films.

Original language	English
Pages (from-to)	7796-7801
Number of pages	6
Journal	Journal of Materials Engineering and Performance
Volume	32
Issue number	17
DOIs	https://doi.org/10.1007/s11665-022-07684-6
State	Published - Sep 2023
Externally published	Yes

Keywords

infrared emissivity
optical reflectance
TiN film
vacuum heat treatment

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10.1007/s11665-022-07684-6

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title = "Investigation on Microstructure Evolution and Visible-Infrared Property of Vacuum-Heat-Treated TiN Film",

abstract = "TiN films were prepared by direct current (DC) reactive magnetron sputtering technique and then vacuum-heat-treated at different temperatures (400, 600 and 800 °C) for 3600 s to improve their properties through increasing the crystallinity and eliminating the lattice defects of the films. Optical properties in the visible-infrared region of TiN films after vacuum heat treatment were investigated. Results revealed that optical reflectance of TiN films first increased and then decreased after the vacuum heat treatment. The reflectance of all the films was below 14%. With the heat treatment temperature rising from 400 to 600 °C, infrared emissivity of TiN films first dropped and then went up at 800 °C. As the heat treatment temperature was 600 °C, the infrared emissivity of TiN films could be reduced to 0.488 and was the lowest. Results showed that vacuum heat treatment could reduce the infrared emissivity of TiN films.",

keywords = "infrared emissivity, optical reflectance, TiN film, vacuum heat treatment",

author = "Linlin Lu and Jie Xu and Jie Dong and Xiaolei Su and Jia Liu",

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doi = "10.1007/s11665-022-07684-6",

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volume = "32",

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T1 - Investigation on Microstructure Evolution and Visible-Infrared Property of Vacuum-Heat-Treated TiN Film

AU - Lu, Linlin

AU - Xu, Jie

AU - Dong, Jie

AU - Su, Xiaolei

AU - Liu, Jia

PY - 2023/9

Y1 - 2023/9

N2 - TiN films were prepared by direct current (DC) reactive magnetron sputtering technique and then vacuum-heat-treated at different temperatures (400, 600 and 800 °C) for 3600 s to improve their properties through increasing the crystallinity and eliminating the lattice defects of the films. Optical properties in the visible-infrared region of TiN films after vacuum heat treatment were investigated. Results revealed that optical reflectance of TiN films first increased and then decreased after the vacuum heat treatment. The reflectance of all the films was below 14%. With the heat treatment temperature rising from 400 to 600 °C, infrared emissivity of TiN films first dropped and then went up at 800 °C. As the heat treatment temperature was 600 °C, the infrared emissivity of TiN films could be reduced to 0.488 and was the lowest. Results showed that vacuum heat treatment could reduce the infrared emissivity of TiN films.

AB - TiN films were prepared by direct current (DC) reactive magnetron sputtering technique and then vacuum-heat-treated at different temperatures (400, 600 and 800 °C) for 3600 s to improve their properties through increasing the crystallinity and eliminating the lattice defects of the films. Optical properties in the visible-infrared region of TiN films after vacuum heat treatment were investigated. Results revealed that optical reflectance of TiN films first increased and then decreased after the vacuum heat treatment. The reflectance of all the films was below 14%. With the heat treatment temperature rising from 400 to 600 °C, infrared emissivity of TiN films first dropped and then went up at 800 °C. As the heat treatment temperature was 600 °C, the infrared emissivity of TiN films could be reduced to 0.488 and was the lowest. Results showed that vacuum heat treatment could reduce the infrared emissivity of TiN films.

KW - infrared emissivity

KW - optical reflectance

KW - TiN film

KW - vacuum heat treatment

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Investigation on Microstructure Evolution and Visible-Infrared Property of Vacuum-Heat-Treated TiN Film

Abstract

Keywords

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