Abstract
Through analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got. Then the first order constant current sensor system and the second order constant temperature sensor system are investigated, and the design basis of the temporal and frequency characteristics of this type sensor is presented, which can offer reference to thermal sensor's device design and performance analysis.
| Original language | English |
|---|---|
| Pages (from-to) | 648-652 |
| Number of pages | 5 |
| Journal | Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument |
| Volume | 27 |
| Issue number | 6 |
| State | Published - Jun 2006 |
Keywords
- Drive circuit
- Response frequency
- Thermal sensor MEMS
- Time constant