Indium tin oxide thin-film thermocouple probe based on sapphire microrod

Jinjun Deng; Linwei Zhang; Liuan Hui; Xinhang Jin; Binghe Ma

doi:10.3390/s20051289

Indium tin oxide thin-film thermocouple probe based on sapphire microrod

Jinjun Deng, Linwei Zhang, Liuan Hui, Xinhang Jin, Binghe Ma

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

Original language	English
Article number	1289
Journal	Sensors
Volume	20
Issue number	5
DOIs	https://doi.org/10.3390/s20051289
State	Published - 1 Mar 2020

Keywords

Indium tin oxide
Sapphire cylinder
Sputtering
Thin-film thermocouple

Access to Document

10.3390/s20051289

Cite this

@article{4bc420b2d56c4396b8a514397152a174,

title = "Indium tin oxide thin-film thermocouple probe based on sapphire microrod",

abstract = "Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.",

keywords = "Indium tin oxide, Sapphire cylinder, Sputtering, Thin-film thermocouple",

author = "Jinjun Deng and Linwei Zhang and Liuan Hui and Xinhang Jin and Binghe Ma",

note = "Publisher Copyright: {\textcopyright} 2020 by the authors. Licensee MDPI, Basel, Switzerland.",

year = "2020",

month = mar,

day = "1",

doi = "10.3390/s20051289",

language = "英语",

volume = "20",

journal = "Sensors",

issn = "1424-8220",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "5",

}

TY - JOUR

T1 - Indium tin oxide thin-film thermocouple probe based on sapphire microrod

AU - Deng, Jinjun

AU - Zhang, Linwei

AU - Hui, Liuan

AU - Jin, Xinhang

AU - Ma, Binghe

PY - 2020/3/1

Y1 - 2020/3/1

N2 - Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

AB - Indium tin oxide (ITO) thin-film thermocouples monitor the temperature of hot section components in gas turbines. As an in situ measuring technology, the main challenge of a thin-film thermocouple is its installation on complex geometric surfaces. In this study, an ITO thin-film thermocouple probe based on a sapphire microrod was used to access narrow areas. The performance of the probe, i.e., the thermoelectricity and stability, was analyzed. This novel sensor resolves the installation difficulties of thin-film devices.

KW - Indium tin oxide

KW - Sapphire cylinder

KW - Sputtering

KW - Thin-film thermocouple

UR - http://www.scopus.com/inward/record.url?scp=85080994174&partnerID=8YFLogxK

U2 - 10.3390/s20051289

DO - 10.3390/s20051289

M3 - 文章

C2 - 32120933

AN - SCOPUS:85080994174

SN - 1424-8220

VL - 20

JO - Sensors

JF - Sensors

IS - 5

M1 - 1289

ER -

Indium tin oxide thin-film thermocouple probe based on sapphire microrod

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this