Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion

Chengxin Li; Fan Wu; Chun Zhao; Hemin Zhang; Mustafa Mert Torunbalci; Chen Wang; Lieven De Strycker; Michael Kraft

doi:10.1109/MEMS61431.2025.10918189

Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion

Chengxin Li, Fan Wu, Chun Zhao, Hemin Zhang, Mustafa Mert Torunbalci, Chen Wang, Lieven De Strycker, Michael Kraft

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents a novel MEMS resonant sensor simultaneously employing piezoresistive and capacitive transductions to generate high-correlation intrinsic noise and signal outputs. The design enables significant flicker noise reduction with a generic recursive filter. The sensor features a double tuning-ending fork resonator with dual piezoresistive gauges that transduces the signals synchronously via both piezoresistive and capacitive mechanisms. The synchronized signals extracted from the two transduction mechanisms are fused with a Kalman filter implemented in a FPGA. The experimental results demonstrate a frequency bias instability of 1.9 ppb with the application of signal fusion, which is a 20-fold improvement compared to using capacitive transduction alone.

Original language	English
Title of host publication	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	946-949
Number of pages	4
ISBN (Electronic)	9798331508890
DOIs	https://doi.org/10.1109/MEMS61431.2025.10918189
State	Published - 2025
Event	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan, Province of China Duration: 19 Jan 2025 → 23 Jan 2025

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	19/01/25 → 23/01/25

Keywords

flicker noise reduction
Kalman filter
piezoresistive gauges
Synchronized transduction

Access to Document

10.1109/MEMS61431.2025.10918189

Cite this

Li, C., Wu, F., Zhao, C., Zhang, H., Torunbalci, M. M., Wang, C., De Strycker, L., & Kraft, M. (2025). Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (pp. 946-949). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS61431.2025.10918189

Li, Chengxin ; Wu, Fan ; Zhao, Chun et al. / Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 946-949 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion",

abstract = "This paper presents a novel MEMS resonant sensor simultaneously employing piezoresistive and capacitive transductions to generate high-correlation intrinsic noise and signal outputs. The design enables significant flicker noise reduction with a generic recursive filter. The sensor features a double tuning-ending fork resonator with dual piezoresistive gauges that transduces the signals synchronously via both piezoresistive and capacitive mechanisms. The synchronized signals extracted from the two transduction mechanisms are fused with a Kalman filter implemented in a FPGA. The experimental results demonstrate a frequency bias instability of 1.9 ppb with the application of signal fusion, which is a 20-fold improvement compared to using capacitive transduction alone.",

keywords = "flicker noise reduction, Kalman filter, piezoresistive gauges, Synchronized transduction",

author = "Chengxin Li and Fan Wu and Chun Zhao and Hemin Zhang and Torunbalci, {Mustafa Mert} and Chen Wang and {De Strycker}, Lieven and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",

year = "2025",

doi = "10.1109/MEMS61431.2025.10918189",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "946--949",

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Li, C, Wu, F, Zhao, C, Zhang, H, Torunbalci, MM, Wang, C, De Strycker, L & Kraft, M 2025, Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion. in 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 946-949, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, Taiwan, Province of China, 19/01/25. https://doi.org/10.1109/MEMS61431.2025.10918189

Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion. / Li, Chengxin; Wu, Fan; Zhao, Chun et al.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 946-949 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - This paper presents a novel MEMS resonant sensor simultaneously employing piezoresistive and capacitive transductions to generate high-correlation intrinsic noise and signal outputs. The design enables significant flicker noise reduction with a generic recursive filter. The sensor features a double tuning-ending fork resonator with dual piezoresistive gauges that transduces the signals synchronously via both piezoresistive and capacitive mechanisms. The synchronized signals extracted from the two transduction mechanisms are fused with a Kalman filter implemented in a FPGA. The experimental results demonstrate a frequency bias instability of 1.9 ppb with the application of signal fusion, which is a 20-fold improvement compared to using capacitive transduction alone.

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Li C, Wu F, Zhao C, Zhang H, Torunbalci MM, Wang C et al. Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 946-949. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS61431.2025.10918189

Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion

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Keywords

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