High-Voltage MEMS Plasma Switch for Boosting the Energy Transfer Efficiency in Triboelectric Nanogenerators

Hemin Zhang, Frédéric Marty, Dimitri Galayko, Naida Hodzic, Philippe Basset

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

This paper presents for the first time a high-voltage MEMS plasma switch for boosting the energy transfer efficiency of conditioning circuits for triboelectric nanogenerators (TENGs). The novel MEMS switch has a narrow-hysteresis loop for a permanent high-efficiency energy conversion thanks to the combination of electrostatic actuation and plasma-discharge. At the same time, the converted energy is automatically transferred to a low-voltage reservoir through a buck converter. The experimental results show that the MEMS switch improves the harvesting efficiency by two orders of magnitude (145 times) compared to the conventional full-wave rectifying circuit architecture.

Original languageEnglish
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages610-613
Number of pages4
ISBN (Electronic)9781728135809
DOIs
StatePublished - Jan 2020
Externally publishedYes
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: 18 Jan 202022 Jan 2020

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/TerritoryCanada
CityVancouver
Period18/01/2022/01/20

Keywords

  • buck converter
  • Electrostatic switch
  • high voltage
  • hysteresis
  • self-actuated
  • triboelectric nanogenerator

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