High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure

Guangyao Pei; Binghe Ma; Jian Luo; Jinjun Deng

doi:10.1109/Transducers50396.2021.9495398

High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure

Guangyao Pei, Binghe Ma, Jian Luo, Jinjun Deng

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

This paper presents a high temperature surface acoustic wave (SAW) sensor with less strain sensitivity. To realize more accurate temperature measurement, a strain isolation structure is designed to alleviate the transfer of inevitable substrate strain to the sensing unit. Langasite (LGS) piezoelectric substrate and composite film electrode are used to ensure the high temperature stability of the sensor. FEA simulation shows the strain isolation effect of the presented structure. Compared with the ordinary sensor, the strain sensitivity of the presented sensor is reduced from 0.1761 to 0.0025 kHz/us. The output presents a quadratic function relationship with temperature in 80-850°C, and an error of less than 5%. is achieved.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1194-1197
Number of pages	4
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495398
State	Published - 20 Jun 2021
Event	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: 20 Jun 2021 → 25 Jun 2021

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/Territory	United States
City	Virtual, Online
Period	20/06/21 → 25/06/21

Keywords

High temperature SAW sensor
strain isolation structure
strain loading experiment
substrate strain interference
temperature sensing experiment

Access to Document

10.1109/Transducers50396.2021.9495398

Cite this

Pei, G., Ma, B., Luo, J., & Deng, J. (2021). High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 1194-1197). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495398

Pei, Guangyao ; Ma, Binghe ; Luo, Jian et al. / High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 1194-1197 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

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title = "High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure",

abstract = "This paper presents a high temperature surface acoustic wave (SAW) sensor with less strain sensitivity. To realize more accurate temperature measurement, a strain isolation structure is designed to alleviate the transfer of inevitable substrate strain to the sensing unit. Langasite (LGS) piezoelectric substrate and composite film electrode are used to ensure the high temperature stability of the sensor. FEA simulation shows the strain isolation effect of the presented structure. Compared with the ordinary sensor, the strain sensitivity of the presented sensor is reduced from 0.1761 to 0.0025 kHz/us. The output presents a quadratic function relationship with temperature in 80-850°C, and an error of less than 5%. is achieved.",

keywords = "High temperature SAW sensor, strain isolation structure, strain loading experiment, substrate strain interference, temperature sensing experiment",

author = "Guangyao Pei and Binghe Ma and Jian Luo and Jinjun Deng",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",

year = "2021",

month = jun,

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doi = "10.1109/Transducers50396.2021.9495398",

language = "英语",

series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

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Pei, G, Ma, B, Luo, J & Deng, J 2021, High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 1194-1197, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Virtual, Online, United States, 20/06/21. https://doi.org/10.1109/Transducers50396.2021.9495398

High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure. / Pei, Guangyao; Ma, Binghe; Luo, Jian et al.
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 1194-1197 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure

AU - Pei, Guangyao

AU - Ma, Binghe

AU - Luo, Jian

AU - Deng, Jinjun

PY - 2021/6/20

Y1 - 2021/6/20

N2 - This paper presents a high temperature surface acoustic wave (SAW) sensor with less strain sensitivity. To realize more accurate temperature measurement, a strain isolation structure is designed to alleviate the transfer of inevitable substrate strain to the sensing unit. Langasite (LGS) piezoelectric substrate and composite film electrode are used to ensure the high temperature stability of the sensor. FEA simulation shows the strain isolation effect of the presented structure. Compared with the ordinary sensor, the strain sensitivity of the presented sensor is reduced from 0.1761 to 0.0025 kHz/us. The output presents a quadratic function relationship with temperature in 80-850°C, and an error of less than 5%. is achieved.

AB - This paper presents a high temperature surface acoustic wave (SAW) sensor with less strain sensitivity. To realize more accurate temperature measurement, a strain isolation structure is designed to alleviate the transfer of inevitable substrate strain to the sensing unit. Langasite (LGS) piezoelectric substrate and composite film electrode are used to ensure the high temperature stability of the sensor. FEA simulation shows the strain isolation effect of the presented structure. Compared with the ordinary sensor, the strain sensitivity of the presented sensor is reduced from 0.1761 to 0.0025 kHz/us. The output presents a quadratic function relationship with temperature in 80-850°C, and an error of less than 5%. is achieved.

KW - High temperature SAW sensor

KW - strain isolation structure

KW - strain loading experiment

KW - substrate strain interference

KW - temperature sensing experiment

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U2 - 10.1109/Transducers50396.2021.9495398

DO - 10.1109/Transducers50396.2021.9495398

M3 - 会议稿件

AN - SCOPUS:85114960936

T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

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BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Y2 - 20 June 2021 through 25 June 2021

ER -

Pei G, Ma B, Luo J, Deng J. High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 1194-1197. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495398

High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure

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