Abstract
Diamond-like coatings (DLC) were deposited on the silicon substrate using a filtered cathodic arc plasma deposition system. The morphology and the hardness of the resulting DLC coatings were observed and determined with an atomic force microscope and a nano-indenter, respectively. The friction behaviors of the DLC coating sliding against SAE-52100 steel at various loads and relative humidities were investigated on a DFPM unidirectional friction coefficient measurement apparatus. The morphologies of the wear scars of the coating and the counterpart steel ball were observed with a scanning electron microscope. The results showed that the DLC coating sliding against the steel at a lower relative humidity registered a lower friction coefficient with small fluctuation, while the friction coefficient rose significantly at increased load and relative humidity. This was attributed to the different formation mechanisms of the graphitized transfer film on the counterpart steel surface. Since the graphitized transfer film formation of the DLC coating on the counterpart steel was restrained in the presence of water, the catastrophic destruction of the film occurred only after 400 slidings at a relative humidity of 100%. Thus the DLC coating prepared was not suitable for the protection of Si-based elements working in the environment of high relative humidity.
| Original language | English |
|---|---|
| Pages (from-to) | 5-9 |
| Number of pages | 5 |
| Journal | Mocaxue Xuebao/Tribology |
| Volume | 23 |
| Issue number | 1 |
| State | Published - Jan 2003 |
| Externally published | Yes |
Keywords
- Diamond-like coatings
- Filtered cathodic arc plasma
- Friction behavior