Flexible, Multi-Shank Stacked Array for High-Density Omini-Directional Intracortical Recording

Zhejun Guo, Longchun Wang, Bowen Ji, Ye Xi, Bin Yang, Jingquan Liu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper presents a flexible multi-shanks omini-directional neural probe array. The flexible probe includes eight shanks with different length, each shank contains 128 recording sites. Traditional Multilayer lithography is applied to fabricate the probe and a novel stacked structure is design with four-sided electrodes (32 sites on surface and 96 sites on sidewall) is proposed in this multi-shank array, which increases the electrode density of integration and the stacked structure can be readily scaled up to 1024 channels. It has been proved that the impedance at 1 kHz of the electrodes on the surface and the sidewalls are 830 kΩ and 1.1 MΩ in vitro respectively. With such design, longer life span can be achieved and the probe can capture richer neural signal. In addition, a method of microwire assisted implantation is proposed to ensure successful implantation in agar model.

Original languageEnglish
Title of host publication34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages540-543
Number of pages4
ISBN (Electronic)9781665419123
DOIs
StatePublished - 25 Jan 2021
Externally publishedYes
Event34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
Duration: 25 Jan 202129 Jan 2021

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2021-January
ISSN (Print)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Country/TerritoryUnited States
CityVirtual, Gainesville
Period25/01/2129/01/21

Keywords

  • flexible
  • high-density
  • Neural probe
  • neural recording

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