@inproceedings{65c27fd60b9f4c7e8a33aa95279a9fbd,
title = "Flexible, Multi-Shank Stacked Array for High-Density Omini-Directional Intracortical Recording",
abstract = "This paper presents a flexible multi-shanks omini-directional neural probe array. The flexible probe includes eight shanks with different length, each shank contains 128 recording sites. Traditional Multilayer lithography is applied to fabricate the probe and a novel stacked structure is design with four-sided electrodes (32 sites on surface and 96 sites on sidewall) is proposed in this multi-shank array, which increases the electrode density of integration and the stacked structure can be readily scaled up to 1024 channels. It has been proved that the impedance at 1 kHz of the electrodes on the surface and the sidewalls are 830 kΩ and 1.1 MΩ in vitro respectively. With such design, longer life span can be achieved and the probe can capture richer neural signal. In addition, a method of microwire assisted implantation is proposed to ensure successful implantation in agar model.",
keywords = "flexible, high-density, Neural probe, neural recording",
author = "Zhejun Guo and Longchun Wang and Bowen Ji and Ye Xi and Bin Yang and Jingquan Liu",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",
year = "2021",
month = jan,
day = "25",
doi = "10.1109/MEMS51782.2021.9375160",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "540--543",
booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",
}