Abstract
We have fabricated polymeric thin films with the ionized cluster beam (ICB) deposited technique. Since the organic polymeric thin films possess very good conducting or insulating characteristics and form single crystal thin films, it is possible to apply them to very large scale integration (VLSI) circuits. Now many scientists are interested in studying the fabrication and application of the organic polymeric thin films. The organic monolayers are usually prepared by the Langmuir-Blodgett technique. However, we prepared the polymeric crystal thin films with the ICB deposited technique. The ICB deposited technique has a few advantages: (1) there are few impurities and defects on the surface and interface of the crystal thin films; (2) the growth conditions of the crystal thin films can be controlled very well through changing the deposited parameters; and (3) it is of lower cost compared with We prepared the polyethylene thin films with the ICB technique. The structures of these thin films have been analysed with the transmission electron miscroscope (TEM). We found a few kinds of crystal structures of polyethylene and we have also analysed these thin films with scanning tunneling microscopy (STM), and obtained the topographies of these thin films deposited on Ni, Au and graphite substrates. We have analysed the samples mentioned above with Auger electron spectroscopy (AES) and low energy electron diffraction (LEED). All analyses mentioned above show that there are a few impurities and defects as well as perfect crystal structures in our prepared samples. We have obtained very good results which will be presented.
Original language | English |
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Pages (from-to) | 1092 |
Number of pages | 1 |
Journal | Vacuum |
Volume | 42 |
Issue number | 16 |
DOIs | |
State | Published - 1991 |
Externally published | Yes |
Event | 1991 International Conference on Thin Film Physics and Applications - Shanghai, China Duration: 15 Apr 1991 → 17 Apr 1991 |