TY - GEN
T1 - Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance Actuation
AU - Chen, Jianlin
AU - Zhang, Hemin
AU - Tsukamoto, Takashiro
AU - Kraft, Michael
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - In this paper, an enhanced stiffness sensitivity in a mode-localized sensor was demonstrated for 1:2 internal resonance (IR) for the first time. Two mode localized modes (anti-phase (AP) and in-phase (IP) modes, with frequencies around 2ωr) could be simultaneously coupled with the rotational mode (ωr) by a nonlinear interaction utilizing internal resonance (IR). When the nonlinear-actuated AP motion is coupled with the IP motion, an enhanced mode coupling can be observed at the IP mode. The concept was investigated by both theoretical model and experimental result. A balanced AP motion up to the jump frequency was generated under IR actuation. In contrast, a strong mode coupling was observed at the IP mode when the stiffness perturbation was introduced. By measuring the amplitude ratio of the IP mode for different stiffness perturbations, the stiffness sensitivity was found to be improved by an order of magnitude to 12400 /Δk/k.
AB - In this paper, an enhanced stiffness sensitivity in a mode-localized sensor was demonstrated for 1:2 internal resonance (IR) for the first time. Two mode localized modes (anti-phase (AP) and in-phase (IP) modes, with frequencies around 2ωr) could be simultaneously coupled with the rotational mode (ωr) by a nonlinear interaction utilizing internal resonance (IR). When the nonlinear-actuated AP motion is coupled with the IP motion, an enhanced mode coupling can be observed at the IP mode. The concept was investigated by both theoretical model and experimental result. A balanced AP motion up to the jump frequency was generated under IR actuation. In contrast, a strong mode coupling was observed at the IP mode when the stiffness perturbation was introduced. By measuring the amplitude ratio of the IP mode for different stiffness perturbations, the stiffness sensitivity was found to be improved by an order of magnitude to 12400 /Δk/k.
KW - Enhanced stiffness sensitivity
KW - Internal resonance
KW - Mode localized sensors
UR - http://www.scopus.com/inward/record.url?scp=85149851615&partnerID=8YFLogxK
U2 - 10.1109/MEMS49605.2023.10052378
DO - 10.1109/MEMS49605.2023.10052378
M3 - 会议稿件
AN - SCOPUS:85149851615
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 865
EP - 868
BT - 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
Y2 - 15 January 2023 through 19 January 2023
ER -