Effect of temperature on the microstructure of boron nitride formed in situ on chemical vapor-deposited boron in ammonia gas

Siwei Li, Litong Zhang, Fang Ye, Yongsheng Liu, Laifei Cheng, Zude Feng, Lifu Chen

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Boron nitride thin layers are in situ fabricated on chemical vapor-deposited boron in ammonia gas. Characterization by X-ray photoelectron spectroscopy and transmission electron microscopy reveals that the nitridation is dominated by different processes with varying temperatures. Below 1300°C the surface reaction is in control and leads to the formation of uniformly thin layer with mostly sp3 boron nitride. As the temperature rises, the nitridation is gradually turned as a diffusion-determining process, after which a thicker but uneven layer with hexagonal sp2 boron nitride is produced.

Original languageEnglish
Pages (from-to)679-682
Number of pages4
JournalJournal of the American Ceramic Society
Volume94
Issue number3
DOIs
StatePublished - Mar 2011

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