Effect of energy density on the machining character of C/SiC composites by picosecond laser

The effect of laser energy density on the machining character of C/SiC composites by picosecond laser was investigated using two machining modes: single ring line and helical lines scanning. For single ring line scanning mode, the width and depth of machining grooves increased nonlinearly with the increase of laser energy density. Moreover, periodic surface structures (ripples) were generated at relative low laser energy density and disappeared at high energy density. With the increasing energy density, the oxygen content of machining debris increased dramatically. For helical lines scanning mode, the depth of machining grooves increased nonlinearly with the increasing laser energy density. With the increasing energy density, the oxygen content of machining debris also increased dramatically. The machining character showed as nano-scale laser-induced ripples, pores, strip structures and bubble pits. Finally, micro-holes of high aspect ratio were obtained in the mode of helical lines scanning by removing multiple layers.