TY - JOUR
T1 - Effect of C/B ratio in reactants on low-pressure CVD boron-doped carbon deposited from a BCl3-C3H6-H2 mixture
AU - Liu, Yongsheng
AU - Zhang, Litong
AU - Cheng, Laifei
AU - Yang, Wenbin
AU - Xu, Yongdong
AU - Zeng, Qingfeng
PY - 2009/12
Y1 - 2009/12
N2 - Propylene was used to fabricate boron-doped carbon coatings by low-pressure chemical vapor deposition. The effects of carbon/boron (C/B) ratio in reactants on the deposition rate, morphologies, and bonding states of the deposits were investigated. Deposition rate increased with increasing C/B ratio, when C/B ratio was less than 4.0. Then, deposition rate decreased with increasing C/B ratio. The maximum rate was 500 nm/h. SEM results showed that cross section morphologies and thickness of deposits were influenced by C/B ratio. Morphologies were compact and not-delaminated with a low C/B ratio, however nanoscale delamination occurred in the deposits with a high C/B ratio. The infiltration characteristic was also influenced by the C/B ratio. The suitable C/B ratio was 1.0-2.0 for infiltration in a T300 carbon bundle. XPS results showed that carbon content is major in the deposits with all C/B ratios. The boron contents decreased and carbon contents increased with increasing C/B ratio. B-sub-C and BC2O were main bonding states. The total contents of B-sub-C and BC2O were above 60.0 at.% with all C/B ratios.
AB - Propylene was used to fabricate boron-doped carbon coatings by low-pressure chemical vapor deposition. The effects of carbon/boron (C/B) ratio in reactants on the deposition rate, morphologies, and bonding states of the deposits were investigated. Deposition rate increased with increasing C/B ratio, when C/B ratio was less than 4.0. Then, deposition rate decreased with increasing C/B ratio. The maximum rate was 500 nm/h. SEM results showed that cross section morphologies and thickness of deposits were influenced by C/B ratio. Morphologies were compact and not-delaminated with a low C/B ratio, however nanoscale delamination occurred in the deposits with a high C/B ratio. The infiltration characteristic was also influenced by the C/B ratio. The suitable C/B ratio was 1.0-2.0 for infiltration in a T300 carbon bundle. XPS results showed that carbon content is major in the deposits with all C/B ratios. The boron contents decreased and carbon contents increased with increasing C/B ratio. B-sub-C and BC2O were main bonding states. The total contents of B-sub-C and BC2O were above 60.0 at.% with all C/B ratios.
KW - Boron-doped carbon
KW - C/B ratio
KW - Low-pressure chemical vapor deposition
UR - http://www.scopus.com/inward/record.url?scp=75549089923&partnerID=8YFLogxK
U2 - 10.1007/s11998-008-9128-2
DO - 10.1007/s11998-008-9128-2
M3 - 文章
AN - SCOPUS:75549089923
SN - 1547-0091
VL - 6
SP - 509
EP - 515
JO - Journal of Coatings Technology and Research
JF - Journal of Coatings Technology and Research
IS - 4
ER -