Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators

Hemin Zhang; Jiangkun Sun; Dongyang Chen; Milind Pandit; Guillermo Sobreviela; Ashwin Seshia

doi:10.1109/SENSORS43011.2019.8956770

Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators

Hemin Zhang, Jiangkun Sun, Dongyang Chen, Milind Pandit, Guillermo Sobreviela, Ashwin Seshia

University of Cambridge

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Amplitude stability is critical for mode-localized sensors with the output metric of such sensors being defined as an amplitude ratio. A systematic study of the drive dependence of the amplitude ratio metric has not been conducted previously. In this paper, we first report that the amplitude stability of the weakly coupled resonators can be improved using a dual-resonator drive method compared to a single-resonator drive method. Experimental validation on a weakly coupled MEMS resonator demonstrates that the normalized amplitude stability can be improved by a mean factor of ~2.9 using the dual-resonator drive method compared to the single-resonator drive method, without any degradation in the frequency stability.

Original language	English
Title of host publication	2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728116341
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956770
State	Published - Oct 2019
Externally published	Yes
Event	18th IEEE Sensors, SENSORS 2019 - Montreal, Canada Duration: 27 Oct 2019 → 30 Oct 2019

Publication series

Name	Proceedings of IEEE Sensors
Volume	2019-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	18th IEEE Sensors, SENSORS 2019
Country/Territory	Canada
City	Montreal
Period	27/10/19 → 30/10/19

Keywords

amplitude stability
coupled resonators
dual resonator drive
vibration mode localization

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10.1109/SENSORS43011.2019.8956770

Cite this

Zhang, H., Sun, J., Chen, D., Pandit, M., Sobreviela, G., & Seshia, A. (2019). Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings Article 8956770 (Proceedings of IEEE Sensors; Vol. 2019-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS43011.2019.8956770

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title = "Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators",

abstract = "Amplitude stability is critical for mode-localized sensors with the output metric of such sensors being defined as an amplitude ratio. A systematic study of the drive dependence of the amplitude ratio metric has not been conducted previously. In this paper, we first report that the amplitude stability of the weakly coupled resonators can be improved using a dual-resonator drive method compared to a single-resonator drive method. Experimental validation on a weakly coupled MEMS resonator demonstrates that the normalized amplitude stability can be improved by a mean factor of ~2.9 using the dual-resonator drive method compared to the single-resonator drive method, without any degradation in the frequency stability.",

keywords = "amplitude stability, coupled resonators, dual resonator drive, vibration mode localization",

author = "Hemin Zhang and Jiangkun Sun and Dongyang Chen and Milind Pandit and Guillermo Sobreviela and Ashwin Seshia",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

year = "2019",

month = oct,

doi = "10.1109/SENSORS43011.2019.8956770",

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Zhang, H, Sun, J, Chen, D, Pandit, M, Sobreviela, G & Seshia, A 2019, Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators. in 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings., 8956770, Proceedings of IEEE Sensors, vol. 2019-October, Institute of Electrical and Electronics Engineers Inc., 18th IEEE Sensors, SENSORS 2019, Montreal, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956770

Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators. / Zhang, Hemin; Sun, Jiangkun; Chen, Dongyang et al.
2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8956770 (Proceedings of IEEE Sensors; Vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - Amplitude stability is critical for mode-localized sensors with the output metric of such sensors being defined as an amplitude ratio. A systematic study of the drive dependence of the amplitude ratio metric has not been conducted previously. In this paper, we first report that the amplitude stability of the weakly coupled resonators can be improved using a dual-resonator drive method compared to a single-resonator drive method. Experimental validation on a weakly coupled MEMS resonator demonstrates that the normalized amplitude stability can be improved by a mean factor of ~2.9 using the dual-resonator drive method compared to the single-resonator drive method, without any degradation in the frequency stability.

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Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators

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