Development of the floating element wall shear stress sensor with an analytical model

G. H. Ding, B. H. Ma, W. Z. Yuan, J. W. Sun, J. J. Deng, J. Luo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper presents an analytical model for the floating element wall shear stress sensor with capacitive sensing. It clarifies the relationships between sensor performances and structural parameters. Therefore, the analytical model promotes the efficiency and effectiveness for obtaining the optimal design scheme of the sensor. A SOI based sensor was fabricated and characterized in this study. The characterizations reveal the maximum wall shear stress of 63 Pa, a nonlinearity of 1.57%FS and the maximum dynamic sensitivity of 86.97 mV/Pa at 6.6 kHz. The experiments were repeated at least three times and the results agree well with the expectations.

Original languageEnglish
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781509010127
DOIs
StatePublished - 21 Dec 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Publication series

NameProceedings of IEEE Sensors
Volume2017-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom
CityGlasgow
Period30/10/171/11/17

Keywords

  • analytical model
  • capacitive sensing
  • floating element
  • static and dynamic characterizations
  • wall shear stress sensor

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