TY - JOUR
T1 - Development of micron-sized Cu–Ag composite paste for oxidation-free bare Cu bonding in air condition and its deterioration mechanism during aging and power cycling tests
AU - Chen, Chuantong
AU - Kim, Dongjin
AU - Liu, Yang
AU - Sekiguchi, Takuya
AU - Su, Yutai
AU - Long, Xu
AU - Liu, Canyu
AU - Liu, Changqing
AU - Suganuma, Katsuaki
N1 - Publisher Copyright:
© 2023 The Author(s)
PY - 2023/5/1
Y1 - 2023/5/1
N2 - The development of next-generation power electronics requires the semiconductor power devices with higher voltage endurance, higher electrical current density under high-temperature operations above 250 °C. Herein, we propose the uses of combined micron-sized Cu particles with Ag–amino composite to achieve a robust direct Cu–Cu bonding under a low sintering pressure and temperature (300 °C) in ambient atmosphere. The strong bonding strength of the Cu–Cu joint structure was evaluated as high as 45.3 MPa under 300 °C sintering temperature with low pressure (1 MPa). For the high temperature reliability evaluation, the sintered Cu–Ag composite Cu–Cu joints were stored at 250 °C in air. The shear strength of the joints remains above 30 MPa after 500 h ageing, suggesting an excellent mechanical stability during high temperature storage. Additionally, a SiC Schottky barrier diode with the sintered Cu–Ag composite joint structure was evaluated during a power cycle test at a junction temperature of 200 °C for 10,000 cycles. The thermal resistance of the joint structure was almost unaffected, and no large delamination was observed after the power cycle test, indicating that the Cu–Ag composite material exhibit remarkable potential in SiC power devices packaging.
AB - The development of next-generation power electronics requires the semiconductor power devices with higher voltage endurance, higher electrical current density under high-temperature operations above 250 °C. Herein, we propose the uses of combined micron-sized Cu particles with Ag–amino composite to achieve a robust direct Cu–Cu bonding under a low sintering pressure and temperature (300 °C) in ambient atmosphere. The strong bonding strength of the Cu–Cu joint structure was evaluated as high as 45.3 MPa under 300 °C sintering temperature with low pressure (1 MPa). For the high temperature reliability evaluation, the sintered Cu–Ag composite Cu–Cu joints were stored at 250 °C in air. The shear strength of the joints remains above 30 MPa after 500 h ageing, suggesting an excellent mechanical stability during high temperature storage. Additionally, a SiC Schottky barrier diode with the sintered Cu–Ag composite joint structure was evaluated during a power cycle test at a junction temperature of 200 °C for 10,000 cycles. The thermal resistance of the joint structure was almost unaffected, and no large delamination was observed after the power cycle test, indicating that the Cu–Ag composite material exhibit remarkable potential in SiC power devices packaging.
KW - Anti-oxidation
KW - Cu–Ag composite Paste
KW - Direct Cu bonding
KW - Electronic packaging
KW - High temperature reliability
KW - Power cycling
KW - Sintering
UR - http://www.scopus.com/inward/record.url?scp=85160300832&partnerID=8YFLogxK
U2 - 10.1016/j.jmrt.2023.05.104
DO - 10.1016/j.jmrt.2023.05.104
M3 - 文章
AN - SCOPUS:85160300832
SN - 2238-7854
VL - 24
SP - 8967
EP - 8983
JO - Journal of Materials Research and Technology
JF - Journal of Materials Research and Technology
ER -