Development of a tri-axis vortex convective gyroscope with suspended silicon thermistors

Honglong Chang; Pingwei Zhou; Xianghui Gong; Jianbing Xie; Weizheng Yuan

doi:10.1109/ICSENS.2013.6688239

Development of a tri-axis vortex convective gyroscope with suspended silicon thermistors

Honglong Chang, Pingwei Zhou, Xianghui Gong, Jianbing Xie, Weizheng Yuan

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

11 Scopus citations

Abstract

This paper reports a tri-axis vortex convective gyroscope, in which a type of suspended silicon thermistor in arch shape is proposed to reduce the thermal-induced stress, heat dissipation to the substrate. The arch structure of the thermistor reduced the thermal-induced stress up to 86% as compared with the clamped-clamped thermistor in our previous work. The experimental test results showed that sensitivities of the sensor for X-axis, Y-axis and Z-axis gyroscope were 0.642mV/°/s, 0.528mV/°/s and 0.241mV/°/s, respectively. The sensitivity improvement reached 49.65%, 56.21% and 51.57% for each axis. The measured nonlinearity for X-axis, Y-axis and Z-axis gyroscope were 2.1%, 3.8% and 4.5% in the range of ±100°/s, respectively. An improvement of 23.53%, 36.67% and 6.25% on the linearity was obtained.

Original language	English
Title of host publication	IEEE SENSORS 2013 - Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781467346405
DOIs	https://doi.org/10.1109/ICSENS.2013.6688239
State	Published - 2013
Event	12th IEEE SENSORS 2013 Conference - Baltimore, MD, United States Duration: 4 Nov 2013 → 6 Nov 2013

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	12th IEEE SENSORS 2013 Conference
Country/Territory	United States
City	Baltimore, MD
Period	4/11/13 → 6/11/13

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10.1109/ICSENS.2013.6688239

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title = "Development of a tri-axis vortex convective gyroscope with suspended silicon thermistors",

abstract = "This paper reports a tri-axis vortex convective gyroscope, in which a type of suspended silicon thermistor in arch shape is proposed to reduce the thermal-induced stress, heat dissipation to the substrate. The arch structure of the thermistor reduced the thermal-induced stress up to 86% as compared with the clamped-clamped thermistor in our previous work. The experimental test results showed that sensitivities of the sensor for X-axis, Y-axis and Z-axis gyroscope were 0.642mV/°/s, 0.528mV/°/s and 0.241mV/°/s, respectively. The sensitivity improvement reached 49.65%, 56.21% and 51.57% for each axis. The measured nonlinearity for X-axis, Y-axis and Z-axis gyroscope were 2.1%, 3.8% and 4.5% in the range of ±100°/s, respectively. An improvement of 23.53%, 36.67% and 6.25% on the linearity was obtained.",

author = "Honglong Chang and Pingwei Zhou and Xianghui Gong and Jianbing Xie and Weizheng Yuan",

year = "2013",

doi = "10.1109/ICSENS.2013.6688239",

language = "英语",

isbn = "9781467346405",

series = "Proceedings of IEEE Sensors",

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booktitle = "IEEE SENSORS 2013 - Proceedings",

note = "12th IEEE SENSORS 2013 Conference ; Conference date: 04-11-2013 Through 06-11-2013",

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AU - Chang, Honglong

AU - Zhou, Pingwei

AU - Gong, Xianghui

AU - Xie, Jianbing

AU - Yuan, Weizheng

PY - 2013

Y1 - 2013

N2 - This paper reports a tri-axis vortex convective gyroscope, in which a type of suspended silicon thermistor in arch shape is proposed to reduce the thermal-induced stress, heat dissipation to the substrate. The arch structure of the thermistor reduced the thermal-induced stress up to 86% as compared with the clamped-clamped thermistor in our previous work. The experimental test results showed that sensitivities of the sensor for X-axis, Y-axis and Z-axis gyroscope were 0.642mV/°/s, 0.528mV/°/s and 0.241mV/°/s, respectively. The sensitivity improvement reached 49.65%, 56.21% and 51.57% for each axis. The measured nonlinearity for X-axis, Y-axis and Z-axis gyroscope were 2.1%, 3.8% and 4.5% in the range of ±100°/s, respectively. An improvement of 23.53%, 36.67% and 6.25% on the linearity was obtained.

AB - This paper reports a tri-axis vortex convective gyroscope, in which a type of suspended silicon thermistor in arch shape is proposed to reduce the thermal-induced stress, heat dissipation to the substrate. The arch structure of the thermistor reduced the thermal-induced stress up to 86% as compared with the clamped-clamped thermistor in our previous work. The experimental test results showed that sensitivities of the sensor for X-axis, Y-axis and Z-axis gyroscope were 0.642mV/°/s, 0.528mV/°/s and 0.241mV/°/s, respectively. The sensitivity improvement reached 49.65%, 56.21% and 51.57% for each axis. The measured nonlinearity for X-axis, Y-axis and Z-axis gyroscope were 2.1%, 3.8% and 4.5% in the range of ±100°/s, respectively. An improvement of 23.53%, 36.67% and 6.25% on the linearity was obtained.

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SN - 9781467346405

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Y2 - 4 November 2013 through 6 November 2013

ER -

Development of a tri-axis vortex convective gyroscope with suspended silicon thermistors

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