TY - JOUR
T1 - Design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope
AU - Xie, Jianbing
AU - Shen, Qiang
AU - Hao, Yongcun
AU - Chang, Honglong
AU - Yuan, Weizheng
N1 - Publisher Copyright:
© 2014, Springer-Verlag Berlin Heidelberg.
PY - 2014/3
Y1 - 2014/3
N2 - This paper presents the design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope. A triple-mass scheme is adopted to obtain a decoupled mode and matched vibration structure. The gyroscope was fabricated based on a 30-μm silicon on insulator wafer. A DRIE, lag-effect-based, dicing-free process was used to easily and rapidly create the gyroscope devices without requiring normal dicing. The fabricated gyroscopes were vacuum packaged (pressure of approximately 2,000 Pa) and tested. The measured power spectral density of the noises is as low as 17.5 μV/√Hz, and the resolution of the fabricated gyroscope is 7.1 × 10–4°/s/√Hz (2.52°/h/√Hz).
AB - This paper presents the design, fabrication and characterization of a low-noise Z-axis micromachined gyroscope. A triple-mass scheme is adopted to obtain a decoupled mode and matched vibration structure. The gyroscope was fabricated based on a 30-μm silicon on insulator wafer. A DRIE, lag-effect-based, dicing-free process was used to easily and rapidly create the gyroscope devices without requiring normal dicing. The fabricated gyroscopes were vacuum packaged (pressure of approximately 2,000 Pa) and tested. The measured power spectral density of the noises is as low as 17.5 μV/√Hz, and the resolution of the fabricated gyroscope is 7.1 × 10–4°/s/√Hz (2.52°/h/√Hz).
UR - http://www.scopus.com/inward/record.url?scp=84922835727&partnerID=8YFLogxK
U2 - 10.1007/s00542-014-2068-0
DO - 10.1007/s00542-014-2068-0
M3 - 文章
AN - SCOPUS:84922835727
SN - 0946-7076
VL - 21
SP - 625
EP - 630
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 3
ER -