Abstract
Traditional Radioisotope Micro Battery (RMB) with direct conversion device of single layer array does not meet the requirements of micro sensor devices for its lower output power. A novel direct conversion device of large array and multi-layers is designed to induce the HARMST (High Aspect Ratio Micro Systems Technology) that results in high efficiency of radio source and large surface area. It could be designed according to the requirements of micro sensor devices, and its process could be integrated with the micro sensor devices. The performance simulation is utilized to the optimal p-n junction depth. The results demonstrate that this direct conversion device has higher output power.
| Original language | English |
|---|---|
| Pages (from-to) | 2488-2490 |
| Number of pages | 3 |
| Journal | Chinese Journal of Sensors and Actuators |
| Volume | 19 |
| Issue number | 6 |
| State | Published - Dec 2006 |
Keywords
- Large array and multi-layers
- Micro sensor devices
- Microelectro mechanical systems
- Process integration
- Radioisotope micro battery