Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometer

Zhongjian Xie, Honglong Chang, Yong Yang, Xiaoqing Li, Pingwei Zhou, Weizheng Yuan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

12 Scopus citations

Abstract

This paper reports a novel vortex multi-axis inertial sensor, which can detect three components of angular rate and three components of linear acceleration simultaneously. It uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. In the implementation, the vortex was formed by jetting the gas into a round chamber through two opposing nozzle orifices in the opposite direction. And the multi-axis detection was realized by a proper configuration of thermistors. The test results show that both the gyroscopes and accelerometers can reach a medium accuracy, which proves the feasibility of the device.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages551-554
Number of pages4
DOIs
StatePublished - 2012
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 29 Jan 20122 Feb 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/TerritoryFrance
CityParis
Period29/01/122/02/12

Keywords

  • 3-axis accelerometer
  • 3-axis gyroscope
  • thermal convective
  • thermistor
  • Vortex inertial sensor

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