Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency

Honglong Chang; Haitao Zhao; Jianbing Xie; Yongcun Hao; Feng Zhang; Weizheng Yuan

doi:10.1109/MEMSYS.2012.6170365

Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency

Honglong Chang, Haitao Zhao, Jianbing Xie, Yongcun Hao, Feng Zhang, Weizheng Yuan

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

This paper reports a novel microgripper with high driving efficiency. The proposed microgripper utilizes the rotational motion of rotary comb actuators to grip the target object directly. Therefore, the inefficient conversion system which is commonly used in recent works is avoided. The gripper is fabricated using a SOI process with a 60μm structural layer. Test results show that this gripper achieves a displacement of 94μm with a driving voltage of 100V and its driving efficiency is increased at least 12 times compared to the existing microgrippers.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1145-1148
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170365
State	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

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10.1109/MEMSYS.2012.6170365

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Chang, H., Zhao, H., Xie, J., Hao, Y., Zhang, F., & Yuan, W. (2012). Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1145-1148). Article 6170365 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170365

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title = "Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency",

abstract = "This paper reports a novel microgripper with high driving efficiency. The proposed microgripper utilizes the rotational motion of rotary comb actuators to grip the target object directly. Therefore, the inefficient conversion system which is commonly used in recent works is avoided. The gripper is fabricated using a SOI process with a 60μm structural layer. Test results show that this gripper achieves a displacement of 94μm with a driving voltage of 100V and its driving efficiency is increased at least 12 times compared to the existing microgrippers.",

author = "Honglong Chang and Haitao Zhao and Jianbing Xie and Yongcun Hao and Feng Zhang and Weizheng Yuan",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170365",

language = "英语",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1145--1148",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Chang, H, Zhao, H, Xie, J, Hao, Y, Zhang, F & Yuan, W 2012, Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170365, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1145-1148, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170365

Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency. / Chang, Honglong; Zhao, Haitao; Xie, Jianbing et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1145-1148 6170365 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency

AU - Chang, Honglong

AU - Zhao, Haitao

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AU - Zhang, Feng

AU - Yuan, Weizheng

PY - 2012

Y1 - 2012

N2 - This paper reports a novel microgripper with high driving efficiency. The proposed microgripper utilizes the rotational motion of rotary comb actuators to grip the target object directly. Therefore, the inefficient conversion system which is commonly used in recent works is avoided. The gripper is fabricated using a SOI process with a 60μm structural layer. Test results show that this gripper achieves a displacement of 94μm with a driving voltage of 100V and its driving efficiency is increased at least 12 times compared to the existing microgrippers.

AB - This paper reports a novel microgripper with high driving efficiency. The proposed microgripper utilizes the rotational motion of rotary comb actuators to grip the target object directly. Therefore, the inefficient conversion system which is commonly used in recent works is avoided. The gripper is fabricated using a SOI process with a 60μm structural layer. Test results show that this gripper achieves a displacement of 94μm with a driving voltage of 100V and its driving efficiency is increased at least 12 times compared to the existing microgrippers.

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DO - 10.1109/MEMSYS.2012.6170365

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SN - 9781467303248

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

Chang H, Zhao H, Xie J, Hao Y, Zhang F, Yuan W. Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1145-1148. 6170365. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170365

Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency

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