CVD Al2O3-SiO2 compound and the mechanism investigation

Zhaofeng Chen; Litong Zhang; Laifei Cheng; Yongdong Xu; Zhihao Jin

CVD Al₂O₃-SiO₂ compound and the mechanism investigation

Zhaofeng Chen, Litong Zhang, Laifei Cheng, Yongdong Xu, Zhihao Jin

School of Materials Sience and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The composition and microstructures of the Al₂O₃-SiO₂: system coatings fabricated by chemical vapor deposition using AlCl₃-SiCl₄-H₂-CO₂: were investigated. The results show that completely compositional homogenization between silica and alumina does not occur under CVD conditions. The products deposited all were the transition Al₂O₃ attached amorphous SiO₂. The size of the Al₂O₃-SiO₂ particles declined with CVD temperature increasing in the range of 550°C-850°C. Dense and crystalline Al₂O₃·SiO₂- α- Al₂O₃-ι- Al₂O₃-SiO₂ coating was obtained by CVD at 1050°C.

Original language	English
Pages (from-to)	609-611
Number of pages	3
Journal	Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Volume	33
Issue number	6
State	Published - Jun 2004

Keywords

Alumina
Chemical vapor deposition
Coating
Mullite
Silica

Cite this

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abstract = "The composition and microstructures of the Al2O3-SiO2: system coatings fabricated by chemical vapor deposition using AlCl3-SiCl4-H2-CO2: were investigated. The results show that completely compositional homogenization between silica and alumina does not occur under CVD conditions. The products deposited all were the transition Al2O3 attached amorphous SiO2. The size of the Al2O3-SiO2 particles declined with CVD temperature increasing in the range of 550°C-850°C. Dense and crystalline Al2O3·SiO2- α- Al2O3-ι- Al2O3-SiO2 coating was obtained by CVD at 1050°C.",

keywords = "Alumina, Chemical vapor deposition, Coating, Mullite, Silica",

author = "Zhaofeng Chen and Litong Zhang and Laifei Cheng and Yongdong Xu and Zhihao Jin",

year = "2004",

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T1 - CVD Al2O3-SiO2 compound and the mechanism investigation

AU - Chen, Zhaofeng

AU - Zhang, Litong

AU - Cheng, Laifei

AU - Xu, Yongdong

AU - Jin, Zhihao

PY - 2004/6

Y1 - 2004/6

N2 - The composition and microstructures of the Al2O3-SiO2: system coatings fabricated by chemical vapor deposition using AlCl3-SiCl4-H2-CO2: were investigated. The results show that completely compositional homogenization between silica and alumina does not occur under CVD conditions. The products deposited all were the transition Al2O3 attached amorphous SiO2. The size of the Al2O3-SiO2 particles declined with CVD temperature increasing in the range of 550°C-850°C. Dense and crystalline Al2O3·SiO2- α- Al2O3-ι- Al2O3-SiO2 coating was obtained by CVD at 1050°C.

AB - The composition and microstructures of the Al2O3-SiO2: system coatings fabricated by chemical vapor deposition using AlCl3-SiCl4-H2-CO2: were investigated. The results show that completely compositional homogenization between silica and alumina does not occur under CVD conditions. The products deposited all were the transition Al2O3 attached amorphous SiO2. The size of the Al2O3-SiO2 particles declined with CVD temperature increasing in the range of 550°C-850°C. Dense and crystalline Al2O3·SiO2- α- Al2O3-ι- Al2O3-SiO2 coating was obtained by CVD at 1050°C.

KW - Alumina

KW - Chemical vapor deposition

KW - Coating

KW - Mullite

KW - Silica

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SN - 1002-185X

VL - 33

SP - 609

EP - 611

JO - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

JF - Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

IS - 6

ER -

CVD Al₂O₃-SiO₂ compound and the mechanism investigation

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Keywords

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