@inproceedings{1494c611eb6847bc928627ecd7ae2a96,
title = "Computer-aided NC programming system for large scale and off-axis aspheric optics in parallel grinding",
abstract = "For the purpose of ultra-precision grinding large scale and complex off-axis aspheric optics effectively and automatically, computer-aided NC programming system was developed in this article. First the mathematical model of aspheric parallel grinding was analyzed, and the manufacture process of aspheric grinding is designed. Then the system architecture was established, which included initial grinding module, on-machine measuring module and error compensation grinding module. After inputting process and aspheric parameters, the system could calculate the grinding wheel X/Z/Y coordinates precisely and simulate the grinding pathway automatically, and then create grinding CNC program, which could control the grinding wheel to move along the aspheric surface. And the on-machine measurement CNC program was created to acquire the form error by displacement sensor. By combining the form error with the aspheric surface coordinates, the grinding wheel coordinates could be calculated and compensation machining CNC program was created. Using this system to manufacturing one large scale and off-axis aspheric optics, the PV of final form error was below 3.0μm, and the RMS was below 0.5μm.",
keywords = "Computer-aided NC programming, Large scale optics, Off-axis aspheric, Ultra-precision parallel grinding",
author = "L. Zhou and Wei, {Q. C.} and Zhao, {S. J.} and Zhang, {Q. H.} and J. Wang and Q. Xu",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-Limited Plasmonic Lithography and Innovative Manufacturing Technology, AOMATT 2018 ; Conference date: 26-06-2018 Through 29-06-2018",
year = "2019",
doi = "10.1117/12.2504960",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xiaoliang Ma and Mingbo Pu and Xiong Li and Rui Zhou and Xuanming Duan and Xiangang Luo",
booktitle = "9th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
}