Abstract
Cr-N films are synthesized by nitrogen ion beam enhanced deposition. The structure of the films is characterized by X-ray diffraction and X-ray photoelectron spectroscopy, where the friction and wear properties of the films are investigated on a ball-on-disc tester. The results Show that the phases and orientation of Cr-N are affected obviously by nitrogen ion bombarding energy, and the films with such lower energy have better tribological properties and higher fracture toughness.
| Original language | English |
|---|---|
| Pages (from-to) | 113-118 |
| Number of pages | 6 |
| Journal | Mocaxue Xuebao/Tribology |
| Volume | 18 |
| Issue number | 2 |
| State | Published - 1998 |
| Externally published | Yes |