Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

Xianglian Lu; Weizheng Yuan; Weijian Li; Pengfei Huo; Chengyu Jiang

Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

Xianglian Lu, Weizheng Yuan, Weijian Li, Pengfei Huo, Chengyu Jiang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.

Original language	English
Pages (from-to)	411-415
Number of pages	5
Journal	Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University
Volume	23
Issue number	3
State	Published - Jun 2005

Keywords

Arnoldi algorithm
Macromodeling method
MEMS device
Taylor series

Cite this

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title = "Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device",

abstract = "Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.",

keywords = "Arnoldi algorithm, Macromodeling method, MEMS device, Taylor series",

author = "Xianglian Lu and Weizheng Yuan and Weijian Li and Pengfei Huo and Chengyu Jiang",

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language = "英语",

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pages = "411--415",

journal = "Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University",

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T1 - Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

AU - Lu, Xianglian

AU - Yuan, Weizheng

AU - Li, Weijian

AU - Huo, Pengfei

AU - Jiang, Chengyu

PY - 2005/6

Y1 - 2005/6

N2 - Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.

AB - Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.

KW - Arnoldi algorithm

KW - Macromodeling method

KW - MEMS device

KW - Taylor series

UR - http://www.scopus.com/inward/record.url?scp=23444449615&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:23444449615

SN - 1000-2758

VL - 23

SP - 411

EP - 415

JO - Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

JF - Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

IS - 3

ER -

Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

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Keywords

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