An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods

Xingang Luan; Shaomin Gu; Qi Qi Zhang; Laifei Cheng; Ralf Riedel

doi:10.1016/j.sna.2021.112824

An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods

Xingang Luan, Shaomin Gu, Qi Qi Zhang, Laifei Cheng, Ralf Riedel

School of Materials Sience and Engineering

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 °C, high temperature conductive coatings are required to match with the YCa₄O(BO₃)₃ (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 °C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 °C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 °C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.

Original language	English
Article number	112824
Journal	Sensors and Actuators, A: Physical
Volume	330
DOIs	https://doi.org/10.1016/j.sna.2021.112824
State	Published - 15 Oct 2021

Keywords

Conductive coating
CVD
PDC
SAW sensor
SiBCN ceramic

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title = "An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods",

abstract = "High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 °C, high temperature conductive coatings are required to match with the YCa4O(BO3)3 (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 °C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 °C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 °C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.",

keywords = "Conductive coating, CVD, PDC, SAW sensor, SiBCN ceramic",

author = "Xingang Luan and Shaomin Gu and Zhang, {Qi Qi} and Laifei Cheng and Ralf Riedel",

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year = "2021",

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doi = "10.1016/j.sna.2021.112824",

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T1 - An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods

AU - Luan, Xingang

AU - Gu, Shaomin

AU - Zhang, Qi Qi

AU - Cheng, Laifei

AU - Riedel, Ralf

PY - 2021/10/15

Y1 - 2021/10/15

N2 - High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 °C, high temperature conductive coatings are required to match with the YCa4O(BO3)3 (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 °C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 °C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 °C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.

AB - High-temperature surface acoustic wave (SAW) sensors for multi-parameter simultaneous measurement are widely needed in the fields of aerospace and energy. For the SAW sensors that can be operated up to 1200 °C, high temperature conductive coatings are required to match with the YCa4O(BO3)3 (YCOB) single crystal, which is the only available piezoelectric ceramics now for use at 1200 °C. Promising high temperature conductive films comprised of SiBCN ceramics were coated via chemical vapor deposition (CVD), polymer-derived ceramic (PDC) route and PDC plus CVD method, respectively. The microstructure, morphology and electrical properties of the films were characterized in detail. It was found that a film with few defects and good conductive performance can be obtained at 1000 °C by PDC plus CVD route. However, a BN film has to be deposited on YCOB wafer first to suppress its decomposition in inert atmospheres around 1000 °C in the case of using CVD method. The overall conductivity change is primarily due to the increase in graphitization degree of free carbon in PDC-SiBCN.

KW - Conductive coating

KW - CVD

KW - PDC

KW - SAW sensor

KW - SiBCN ceramic

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DO - 10.1016/j.sna.2021.112824

M3 - 文章

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SN - 0924-4247

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JO - Sensors and Actuators, A: Physical

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ER -

An electrically conductive SiBCN film prepared via polymer-derived ceramic and chemical vapor deposition methods

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Keywords

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