A tilt sensor with a constant sensitivity output in the full measurement range

Enfu Li, Jiming Zhong, Boyang Li, Honglong Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This paper presents a tilt sensor using two orthogonally arranged micro accelerometers. The arctangent function arctan(a2/a1) instead of the traditional arcsine function arcsin(a2/g) or arcsin(a1/g) is used to solve for the tilt angle. As a result, the tilt angle measurement is kept in the maximum value with a constant sensitivity (17.45 mg per degree) in the full measurement range.

Original languageEnglish
Title of host publication2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages198-201
Number of pages4
ISBN (Electronic)9781509030590
DOIs
StatePublished - 25 Aug 2017
Event12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States
Duration: 9 Apr 201712 Apr 2017

Publication series

Name2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Conference

Conference12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Country/TerritoryUnited States
CityLos Angeles
Period9/04/1712/04/17

Keywords

  • MEMS accelerometer
  • sensitivity
  • tilt sensor

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