A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

Aojie Quan; Chen Wang; Hemin Zhang; Michel De Cooman; Chenxi Wang; Linlin Wang; Sina Sadeghpour; Michael Kraft

doi:10.1109/Transducers50396.2021.9495471

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

Aojie Quan, Chen Wang, Hemin Zhang, Michel De Cooman, Chenxi Wang, Linlin Wang, Sina Sadeghpour, Michael Kraft

KU Leuven

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Scopus citations

Abstract

This paper demonstrates, for the first time, a high sensitivity mass sensor based on thermal-actuation piezoresistive-detection coupled resonators with a self-sustained oscillation. In-plane-vibration resonators are actuated by thermal expansion and contraction of the nanobeams, while the vibration displacements are detected by changes in resistance. Due to the combination of the negative piezoresistive coefficient of the phosphorus-doped structural silicon layer and the thermal expansion/contraction effect, a constant direct current (DC) through the nanobeam produces a periodic resistance variation in the beam at the fundamental modal frequency as the resonator, thus a self-sustained oscillation is generated. An ultra-high quality factor of 95k in air is obtained. Linear response with respect to mass perturbations for both amplitude ratio (of the two coupled resonators) and frequency shift readouts are observed from the proposed self-oscillating, mode-localized mass sensor. The measured sensitivity of the amplitude ratio (162 ppm/pg) is 100 × higher than that of a shift in the normalized resonant frequency.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	168-171
Number of pages	4
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495471
State	Published - 20 Jun 2021
Externally published	Yes
Event	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States Duration: 20 Jun 2021 → 25 Jun 2021

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/Territory	United States
City	Virtual, Online
Period	20/06/21 → 25/06/21

Keywords

Coupled resonators
Mass sensor
Quality factor
Self-oscillation
Thermal-piezoresistive

Access to Document

10.1109/Transducers50396.2021.9495471

Cite this

Quan, A., Wang, C., Zhang, H., De Cooman, M., Wang, C., Wang, L., Sadeghpour, S., & Kraft, M. (2021). A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 168-171). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495471

Quan, Aojie ; Wang, Chen ; Zhang, Hemin et al. / A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 168-171 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

@inproceedings{5aa7dcb60349483e8b0a1a3a65fdd3b4,

title = "A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air",

abstract = "This paper demonstrates, for the first time, a high sensitivity mass sensor based on thermal-actuation piezoresistive-detection coupled resonators with a self-sustained oscillation. In-plane-vibration resonators are actuated by thermal expansion and contraction of the nanobeams, while the vibration displacements are detected by changes in resistance. Due to the combination of the negative piezoresistive coefficient of the phosphorus-doped structural silicon layer and the thermal expansion/contraction effect, a constant direct current (DC) through the nanobeam produces a periodic resistance variation in the beam at the fundamental modal frequency as the resonator, thus a self-sustained oscillation is generated. An ultra-high quality factor of 95k in air is obtained. Linear response with respect to mass perturbations for both amplitude ratio (of the two coupled resonators) and frequency shift readouts are observed from the proposed self-oscillating, mode-localized mass sensor. The measured sensitivity of the amplitude ratio (162 ppm/pg) is 100 × higher than that of a shift in the normalized resonant frequency.",

keywords = "Coupled resonators, Mass sensor, Quality factor, Self-oscillation, Thermal-piezoresistive",

author = "Aojie Quan and Chen Wang and Hemin Zhang and {De Cooman}, Michel and Chenxi Wang and Linlin Wang and Sina Sadeghpour and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",

year = "2021",

month = jun,

day = "20",

doi = "10.1109/Transducers50396.2021.9495471",

language = "英语",

series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "168--171",

booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",

}

Quan, A, Wang, C, Zhang, H, De Cooman, M, Wang, C, Wang, L, Sadeghpour, S & Kraft, M 2021, A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 168-171, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Virtual, Online, United States, 20/06/21. https://doi.org/10.1109/Transducers50396.2021.9495471

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air. / Quan, Aojie; Wang, Chen; Zhang, Hemin et al.
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 168-171 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

AU - Quan, Aojie

AU - Wang, Chen

AU - Zhang, Hemin

AU - De Cooman, Michel

AU - Wang, Chenxi

AU - Wang, Linlin

AU - Sadeghpour, Sina

AU - Kraft, Michael

PY - 2021/6/20

Y1 - 2021/6/20

N2 - This paper demonstrates, for the first time, a high sensitivity mass sensor based on thermal-actuation piezoresistive-detection coupled resonators with a self-sustained oscillation. In-plane-vibration resonators are actuated by thermal expansion and contraction of the nanobeams, while the vibration displacements are detected by changes in resistance. Due to the combination of the negative piezoresistive coefficient of the phosphorus-doped structural silicon layer and the thermal expansion/contraction effect, a constant direct current (DC) through the nanobeam produces a periodic resistance variation in the beam at the fundamental modal frequency as the resonator, thus a self-sustained oscillation is generated. An ultra-high quality factor of 95k in air is obtained. Linear response with respect to mass perturbations for both amplitude ratio (of the two coupled resonators) and frequency shift readouts are observed from the proposed self-oscillating, mode-localized mass sensor. The measured sensitivity of the amplitude ratio (162 ppm/pg) is 100 × higher than that of a shift in the normalized resonant frequency.

AB - This paper demonstrates, for the first time, a high sensitivity mass sensor based on thermal-actuation piezoresistive-detection coupled resonators with a self-sustained oscillation. In-plane-vibration resonators are actuated by thermal expansion and contraction of the nanobeams, while the vibration displacements are detected by changes in resistance. Due to the combination of the negative piezoresistive coefficient of the phosphorus-doped structural silicon layer and the thermal expansion/contraction effect, a constant direct current (DC) through the nanobeam produces a periodic resistance variation in the beam at the fundamental modal frequency as the resonator, thus a self-sustained oscillation is generated. An ultra-high quality factor of 95k in air is obtained. Linear response with respect to mass perturbations for both amplitude ratio (of the two coupled resonators) and frequency shift readouts are observed from the proposed self-oscillating, mode-localized mass sensor. The measured sensitivity of the amplitude ratio (162 ppm/pg) is 100 × higher than that of a shift in the normalized resonant frequency.

KW - Coupled resonators

KW - Mass sensor

KW - Quality factor

KW - Self-oscillation

KW - Thermal-piezoresistive

UR - http://www.scopus.com/inward/record.url?scp=85114962004&partnerID=8YFLogxK

U2 - 10.1109/Transducers50396.2021.9495471

DO - 10.1109/Transducers50396.2021.9495471

M3 - 会议稿件

AN - SCOPUS:85114962004

T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

SP - 168

EP - 171

BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Y2 - 20 June 2021 through 25 June 2021

ER -

Quan A, Wang C, Zhang H, De Cooman M, Wang C, Wang L et al. A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 168-171. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495471

A Thermal-Piezoresistive Self-Sustained Resonant Mass Sensor with High-Q (>95k) in Air

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