A rotary comb-actuated microgripper with a large displacement range

Honglong Chang; Haitao Zhao; Fang Ye; Guangmin Yuan; Jianbing Xie; Michael Kraft; Weizheng Yuan

doi:10.1007/s00542-013-1737-8

A rotary comb-actuated microgripper with a large displacement range

Honglong Chang, Haitao Zhao, Fang Ye, Guangmin Yuan, Jianbing Xie, Michael Kraft, Weizheng Yuan

Research output: Contribution to journal › Article › peer-review

48 Scopus citations

Abstract

This paper reports a novel design for electrostatic microgrippers. The new structure utilizes rotary comb actuators to solve the pull-in problem of microgrippers during large displacement manipulation and therefore avoids the widely used conversion systems which necessitate a high driving voltage. The gripper is fabricated using a SOI process with a 60 μm structural layer. Test results show the gripper obtained a displacement of 94 μm with an applied voltage of 100 V. An animal hair is gripped to demonstrate the applicability of the gripper for micro object manipulations.

Original language	English
Pages (from-to)	119-126
Number of pages	8
Journal	Microsystem Technologies
Volume	20
Issue number	1
DOIs	https://doi.org/10.1007/s00542-013-1737-8
State	Published - Jan 2014

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AU - Yuan, Weizheng

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AB - This paper reports a novel design for electrostatic microgrippers. The new structure utilizes rotary comb actuators to solve the pull-in problem of microgrippers during large displacement manipulation and therefore avoids the widely used conversion systems which necessitate a high driving voltage. The gripper is fabricated using a SOI process with a 60 μm structural layer. Test results show the gripper obtained a displacement of 94 μm with an applied voltage of 100 V. An animal hair is gripped to demonstrate the applicability of the gripper for micro object manipulations.

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A rotary comb-actuated microgripper with a large displacement range

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